Critical Accessories to put a Field-Emission Scanning Electron Microscope in User Service

将场发射扫描电子显微镜用于用户服务的关键配件

• 批准号: RTI-2016-00050
• 负责人: Leung, Kam
• 金额: $ 10.75万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments
• 财政年份: 2015
• 资助国家: 加拿大
• 起止时间: 2015-01-01 至 2016-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=591325
• 关键词: Critical; Accessories; put; Field; Emission

This equipment application seeks the support for three critically needed accessories to enable a state-of-the-art field-emission scanning electron microscope (SEM) to be used not just as an advanced imaging tool but also as a powerful nanoanalytical tool for quantitative elemental analysis. Equipped with a new second-generation Gemini-II electron optics column and multiple advanced detector systems, the Zeiss Merlin SEM is a powerful, ultrahigh resolution imaging tool. With its fine beam spot and high current capability, the new microscope is particularly well suited to the requested energy-dispersive X-ray analysis system, allowing the user to map the elemental composition of the near-surface with high precision and high speed. This capability will significantly improve the composition analysis of the nanomaterials on hand. With the requested accessories, the new SEM system will not only relieve the huge user backlog on our existing 15-years-old field-emission SEM system on campus, it will also provide significant improvement in elemental quantification of new materials, providing detailed composition maps that are not possible with our existing SEM system. The present tool will serve the research needs of over 75 local research groups from the University of Waterloo and 30 academic groups from other Canadian universities. This request will also provide a load-lock system to allow fast sample interchange (that will improve the efficiency and increase the number of users served) and an accounting software (that will enable us to effectively perform cost recovery so that the facility can be run in a revenue-neutral fashion). The request is critically needed for the continued survival of the diverse materials science and engineering research programs at Waterloo (and at least 30 thesis projects depend on this instrument).

该设备应用程序寻求支持三个迫切需要的配件，以实现最先进的现场发射扫描电子显微镜（SEM），不仅可以用作高级成像工具，而且还可以用作有效的纳米分析工具来进行定量元素分析。 Zeiss Merlin SEM配备了新的第二代GEMINI-II电子光学列和多个高级检测器系统，是一种功能强大的超高分辨率成像工具。 凭借其良好的光束斑点和高电流功能，新的显微镜特别适合所需的能量分散性X射线分析系统，从而使用户可以高精度和高速绘制近地面的元素组成。 该能力将显着改善手头纳米材料的组成分析。 借助请求的配件，新的SEM系统不仅可以减轻我们现有的15岁现场发射SEM系统的巨大用户积压，还将在我们现有的SEM系统中提供不可能的详细构图图，从而为新材料的基本量化提供显着改善。 本工具将满足滑铁卢大学75多个本地研究小组的研究需求，以及其他加拿大大学的30个学术团体。 该请求还将提供一个负载锁定系统，以允许快速样本互换（这将提高效率并增加所提供的用户数量）和会计软件（这将使我们能够有效地执行成本恢复，以便可以以中立的方式运行该设施）。 该请求非常需要在滑铁卢的多种材料科学和工程研究计划的持续生存（至少30个论文项目取决于该工具）。