Critical Accessories to put a Field-Emission Scanning Electron Microscope in User Service

将场发射扫描电子显微镜用于用户服务的关键配件

• 批准号: RTI-2016-00050
• 负责人: Leung, Kam
• 金额: $ 10.75万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments
• 财政年份: 2015
• 资助国家: 加拿大
• 起止时间: 2015-01-01 至 2016-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=591325
• 关键词: Critical; Accessories; put; Field; Emission

This equipment application seeks the support for three critically needed accessories to enable a state-of-the-art field-emission scanning electron microscope (SEM) to be used not just as an advanced imaging tool but also as a powerful nanoanalytical tool for quantitative elemental analysis. Equipped with a new second-generation Gemini-II electron optics column and multiple advanced detector systems, the Zeiss Merlin SEM is a powerful, ultrahigh resolution imaging tool. With its fine beam spot and high current capability, the new microscope is particularly well suited to the requested energy-dispersive X-ray analysis system, allowing the user to map the elemental composition of the near-surface with high precision and high speed. This capability will significantly improve the composition analysis of the nanomaterials on hand. With the requested accessories, the new SEM system will not only relieve the huge user backlog on our existing 15-years-old field-emission SEM system on campus, it will also provide significant improvement in elemental quantification of new materials, providing detailed composition maps that are not possible with our existing SEM system. The present tool will serve the research needs of over 75 local research groups from the University of Waterloo and 30 academic groups from other Canadian universities. This request will also provide a load-lock system to allow fast sample interchange (that will improve the efficiency and increase the number of users served) and an accounting software (that will enable us to effectively perform cost recovery so that the facility can be run in a revenue-neutral fashion). The request is critically needed for the continued survival of the diverse materials science and engineering research programs at Waterloo (and at least 30 thesis projects depend on this instrument).

该设备申请寻求对三种急需的配件的支持，以使最先进的场发射扫描电子显微镜（SEM）不仅可用作先进的成像工具，还可用作定量元素分析的强大纳米分析工具。 蔡司Merlin SEM配备了全新的第二代Gemini-II电子光学柱和多个先进的探测器系统，是一款功能强大的高分辨率成像工具。 凭借其精细的束斑和高电流能力，新型显微镜特别适合所需的能量色散X射线分析系统，允许用户以高精度和高速度绘制近表面的元素组成。 这一能力将显著改善现有纳米材料的成分分析。 有了所需的配件，新的SEM系统不仅可以减轻我们现有的15年历史的场发射SEM系统在校园里的巨大用户积压，它还将在新材料的元素定量方面提供显着的改进，提供我们现有的SEM系统无法提供的详细成分图。 目前的工具将服务于滑铁卢大学超过75个当地研究小组和来自其他加拿大大学的30个学术团体的研究需求。 这一要求还将提供一个装载锁定系统，以便能够快速交换样品（这将提高效率，增加所服务的用户数量）和一个会计软件（这将使我们能够有效地收回成本，以便该设施能够以不增加收入的方式运作）。 该请求是至关重要的，需要在滑铁卢的各种材料科学和工程研究项目的持续生存（和至少30论文项目依赖于这个仪器）。