Profilometer Urgently Needed to Measure Thickness of Films Made in the Applied Micro and Nanosystems Facility

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The Applied Micro and Nanosystems Facility (AMNF) is a multi-disciplinary and multi-user clean-room fabrication facility that supports experimental research of UBC Okanagan professors working in areas such as photonics, plasmonics, lab-on-a-chip systems, fluid dynamics, and biomaterials. This application requests a critical piece of equipment for the AMNF - a profilometer. The profilometer will enable highly accurate, robust, ex-situ measurement of thin-film thicknesses ranging from 0 to 1.2 microns. It is considered to be a standard piece of equipment in clean-room fabrication facilities, as it is routinely used to verify the thickness of fabricated films and to calibrate film deposition rates. We are urgently requesting this equipment because the AMNF does not have a profilometer. As a result, users of the sputter deposition system in the AMNF are making films without accurate knowledge of film thickness or using costly and slow workarounds such as outsourced characterization. With this proposed upgrade, AMNF users can apply their time and resources more effectively to explore the end applications of fabricated devices, increasing the quality of HQP training.