Thermal micro-systems for gas monitoring

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The work described in this proposal focuses on gas sensors suitable for use in air quality monitoring, although the technology developed could be applied to a range of other applications including environmental monitoring, health services, industrial control, automotive, food processing, and safety. The advantages offered by this technology over existing devices include low power, compact size, and fast response. The results of this work will be of immediate interest to manufacturing companies using microfabrication techniques, sensor and monitoring companies, and end users. The operation of the sensors in this work relies on absorption of infrared light by individual gas species in a mixture to determine gas composition. Infrared light sources, detectors, and filters, can all be microfabricated and potentially integrated together to form a gas detector. This will potentially make devices smaller, less expensive, and require less power, enabling battery powered operation. This proposal builds on considerable expertise at Carleton University in micro-electro-mechanical systems (MEMS), sensors, thermal actuators and thermal detectors in order to improve current gas sensing technology. The nature of the work will include development of MEMS thermal isolation structures for hotplates, infrared (IR) sources and IR sensors. The technology will be suitable for integration with electronics for temperature control, source modulation, and detector readout. Canadian companies and industry find it necessary to look abroad for expertise in gas sensing. This work will help supply local expertise to domestic sensor and monitoring companies and industries. This activity will support Canada’s obligation to monitor and maintain healthy air quality for all citizens.