Infrared MEMS

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In the past the mid and far infrared spectrum was mainly of interest to astronomers and a few spectroscopists,but in recent years interest has grown dramatically in sensing and imaging using this wavelength range. One of the challenges to expanding application of infrared technology is in devising miniature systems suitable for field use. These might be, for example, portable hand held devices or units mounted on remotely operated or autonomous vehicles. It is therefore necessary to develop compact, efficient, low cost source and detector technologies that do not require cooling. A key goal of the proposed program is to merge ideas in infrared materials, micromachining, thermal design, plasmonics, and metasurfaces to extend the performance expectations for thermal mid and far infrared sources, detectors, and optical components. This work will lead to an improved understanding of the interaction between heat, light, materials, and structures. The results will find application in non dispersive and spectroscopic gas sensing, materials analysis, and multi and hyper spectral imaging. The proposed program will develop microfabricated infrared optical elements by monolithically integrating micromachined thermal isolation structures with plasmonic and metamaterial structures for dispersion control. The combination of technologies will lead to highly efficient infrared emitters with engineered emission spectra. The applicant has extensive experience in thermal detectors, microfabrication, thin film materials, process design and development for MEMS and sensors and will ensure an experimental demonstration of a manufacturable device using local microfabrication capabilities. Existing collaborations on plasmonic sensors, on thermal and optical device modeling, and on infrared metamaterials will support numerical evaluation of design concepts. Collaboration between groups at Carleton, local companies, and external service labs will enable comprehensive device testing. The significance of this work will be seen in a number of areas. The Quantum Cascade Laser is the standard for intense and coherent radiation in the mid to far infrared. However the MEMS thermal emitter continues to be a popular IR source available from several vendors. A more efficient emitter with a customized emission spectrum will find a market in miniature, low power and low cost gas sensors. Miniaturization of optical and detector components in this wavelength range will enable arrays of detectors with different spectral response allowing multi spectral measurements. Further development of tunable elements through thermal or electrostatic actuation can lead to measurement of a continuous spectrum for imaging or spectroscopic measurement.