Diagnostics of cold and highly reactive plasmas applied to complex materials processing

适用于复杂材料加工的冷等离子体和高反应性等离子体的诊断

• 批准号: 355378-2013
• 负责人: Stafford, Luc
• 金额: $ 3.79万
• 依托单位: Université de Montréal
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2017
• 资助国家: 加拿大
• 起止时间: 2017-01-01 至 2018-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=633181
• 关键词: Diagnostics; cold; highly; reactive; plasmas

Since 2008, I have been leading at U. Montréal a research program on the physics of plasma-surface interactions in complex thin films and nanomaterials processing. In this context, important research efforts were devoted to the development of advanced plasma sources, plasma diagnostics, and in-situ surface characterization tools to monitor the number density and energy distribution of charged and reactive neutral species as well as the reaction kinetics driving their interactions with plasma-exposed substrates and chamber walls. This research has been extremely successful, providing significant advances on many aspects related to the plasma deposition and plasma etching dynamics of multi-component oxide and nitride thin films relevant for electronics, optoelectronics, and MEMS. Novel applications have also been explored, including the value maximization of selected Canadian wood species through plasma functionalization using the flowing afterglow of a cold, dielectric barrier discharge (DBDs) at atmospheric-pressure. Over the next five years, I intend to pursue my investigations of cold and highly reactive plasma sources and to explore new fields of applications in complex materials processing that intimately combine plasma physics and chemistry with nanoscience and nanotechnologies. The impact of this research is expected to be tremendously extended with the completion of the "Laboratoire d'interactions plasmas-couches minces et plasmas-nanomatériaux (LIPP)" recently awarded by the CFI and Quebec government. Some of the instruments acquired through this grant are unique in the world, and thus allow unprecedented experimental capabilities to develop and implement innovative processes based on cold and highly reactive plasmas. The main outcome of this proposal is the generation of new knowledge on front-edge materials processing methods. The research is obviously precompetitive, but has a strong potential to contribute to the development of novel applications in fields of strategic importance for the Canadian economy. Another outcome is the training of a significant amount of HQP with multidisciplinary skills that are directly relevant to Canada's high-techology sectors.

自 2008 年以来，我一直在蒙特利尔大学领导一项关于复杂薄膜和纳米材料加工中等离子体-表面相互作用物理学的研究项目。在此背景下，重要的研究工作致力于开发先进的等离子体源、等离子体诊断和原位表面表征工具，以监测带电和反应性中性物质的数量密度和能量分布，以及驱动它们与暴露于等离子体的基底和室壁相互作用的反应动力学。这项研究非常成功，在与电子、光电子和 MEMS 相关的多组分氧化物和氮化物薄膜的等离子体沉积和等离子体蚀刻动力学相关的许多方面取得了重大进展。还探索了新的应用，包括利用大气压下冷介电阻挡放电 (DBD) 的流动余辉，通过等离子体功能化，使选定的加拿大木材品种的价值最大化。在接下来的五年中，我打算继续研究冷和高反应性等离子体源，并探索将等离子体物理和化学与纳米科学和纳米技术紧密结合的复杂材料加工的新应用领域。随着 CFI 和魁北克政府最近授予的“等离子体-沙发、肉末和等离子体-纳米材料相互作用实验室 (LIPP)”的完成，预计这项研究的影响将得到极大扩展。通过这笔赠款获得的一些仪器在世界上是独一无二的，因此具有前所未有的实验能力，可以开发和实施基于冷和高反应性等离子体的创新工艺。该提案的主要成果是产生有关前沿材料加工方法的新知识。该研究显然是竞争前的，但具有巨大的潜力，有助于在对加拿大经济具有战略重要性的领域开发新颖的应用。另一个成果是培训了大量具有与加拿大高科技部门直接相关的多学科技能的总部人员。