Diagnostics of cold and highly reactive plasmas applied to complex materials and nanomaterials processing

适用于复杂材料和纳米材料加工的冷等离子体和高反应性等离子体的诊断

• 批准号: RGPIN-2018-04550
• 负责人: Stafford, Luc
• 金额: $ 3.64万
• 依托单位: Université de Montréal
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2020
• 资助国家: 加拿大
• 起止时间: 2020-01-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=713038
• 关键词: Diagnostics; cold; highly; reactive; plasmas

Since 2008, I have been leading at U. Montréal an ambitious research program on the physics of plasma-surface interactions in complex thin films and nanomaterials processing. In this context, important research efforts are devoted to the development of plasma sources, plasma diagnostics, and in-situ surface characterization tools to monitor the number density and energy distribution of charged and reactive neutral species as well as the reaction kinetics driving their interactions with plasma-exposed substrates and chamber walls. In recent years, this program has been extremely successful in terms of both research accomplishments and HQP training. More specifically, our research has provided significant advances on many aspects related to the plasma deposition and plasma etching dynamics of multi-component oxide thin films relevant for electronics and photonics as well as in the development of new optical spectroscopic diagnostic methods coupled with collisional-radiative models for the characterization of charged and excited neutral species. This includes low-pressure microwave plasmas in presence of collisionless electron heating, low-pressure dusty plasmas with cyclic variations of the nanoparticle formation and loss dynamics, but also non-thermal, atmospheric-pressure plasmas produced by both low- and high-frequency electric fields. Novel applications with very strong technological impact for Canada have also been explored, including the value maximization of wood-based products using cold, dielectric barrier discharges (DBDs) at atmospheric pressure and the plasma-induced doping of graphene films using the flowing afterglow of microwave plasmas at reduced pressure. Over the next five years, I intend to pursue my investigations of cold and highly reactive plasma sources and to explore new fields of applications in complex materials processing that combine plasma physics and chemistry with nanoscience and nanotechnologies. The impact of this research is expected to be tremendously extended with the set-up of a new Canada research chair on the physics and applications of cold and highly reactive plasmas and the completion of 3 infrastructure projects awarded by CFI. Some of the plasma-based instruments acquired through these grants are unique in the world, and thus allow unprecedented experimental capabilities to develop and implement innovative processes based on cold and highly reactive plasmas. The main outcome of this proposal is the generation of new knowledge on front-edge materials processing methods. The research is obviously precompetitive, but has a strong potential to contribute to the development of new applications in fields of strategic importance for the Canadian economy. Another outcome is the training of a significant amount of top-level HQP with multidisciplinary skills that are directly relevant to Canada's high-techology sectors.

自 2008 年以来，我一直在蒙特利尔大学领导一项雄心勃勃的研究项目，研究复杂薄膜和纳米材料加工中等离子体-表面相互作用的物理现象。在这种背景下，重要的研究工作致力于开发等离子体源、等离子体诊断和原位表面表征工具，以监测带电和反应性中性物质的数量密度和能量分布，以及驱动它们与暴露于等离子体的基底和室壁相互作用的反应动力学。 近年来，该项目无论在研究成果还是总部培训方面都非常成功。更具体地说，我们的研究在与电子和光子学相关的多组分氧化物薄膜的等离子体沉积和等离子体蚀刻动力学相关的许多方面取得了重大进展，并在开发新的光学光谱诊断方法以及用于表征带电和激发中性物质的碰撞辐射模型方面取得了重大进展。这包括存在无碰撞电子加热的低压微波等离子体、具有纳米颗粒形成和损失动态的循环变化的低压尘埃等离子体，以及由低频和高频电场产生的非热大气压等离子体。还探索了对加拿大具有强大技术影响的新颖应用，包括在大气压下使用冷介电阻挡放电（DBD）实现木质产品的价值最大化，以及在减压下使用微波等离子体流动余辉对石墨烯薄膜进行等离子体诱导掺杂。 在接下来的五年中，我打算继续研究冷和高反应性等离子体源，并探索将等离子体物理和化学与纳米科学和纳米技术相结合的复杂材料加工的新应用领域。随着加拿大冷等离子体和高反应性等离子体物理和应用新研究主席的设立以及 CFI 授予的 3 个基础设施项目的完成，预计这项研究的影响将得到极大扩展。通过这些赠款获得的一些基于等离子体的仪器在世界上是独一无二的，因此具有前所未有的实验能力，可以开发和实施基于冷和高反应性等离子体的创新工艺。该提案的主要成果是产生有关前沿材料加工方法的新知识。该研究显然是竞争前的，但具有强大的潜力，有助于在对加拿大经济具有战略重要性的领域开发新应用。另一个成果是培训了大量具有与加拿大高科技部门直接相关的多学科技能的顶级高级人才。