Data acquisition and analysis system for electron probe micro-analyzer

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A new data acquisition and analysis system is requested to upgrade a Cameca SX-100 electron probe micro-analyzer (EPMA) at the Laboratoire de microanalyse. The EPMA provides in situ chemical analyses for major to trace elements (10s ppm) with a spatial resolution up to 1um3. The EPMA chemical composition data has a high precision (< 5%, major elements; <20% traces), and accuracy. The new system is urgently required to replace the aging, 20-year old system running on an outdated UNIX UltraSparc I workstation, for which replacement parts are no longer available. The detector of the original EDS system on the EPMA has lost sensitivity and spectral resolution and cannot provide anymore the accurate and precise results required by our research programs. These upgrades are critical and urgent to operate the EPMA, and will significantly enhance and extend the EPMA capabilities beyond their original level, providing critical analytical capabilities to carry our research programs.