Development of novel silicon photonic sensors for industrial applications

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Robotic control is now ubiquitous in manufacturing. While early robot manufacturing relied mostly on "blind"**repetitive processes, modern robots with increased "intelligence" need to rely on various types of sensors in**order to control processes such as those required by semiconductor wafer fabrication equipment. The research**that we are proposing, which will be performed in concert with the technical staff of Photon Control Inc., a**local Richmond, BC, based company, will explore the potential for the development of compact (ie miniature)**temperature, position and displacement sensor subsystems using techniques developed for silicon photonics as**well as hybrid photonics integration. Light sources, such as light emitting diodes (LED) and semiconductor**lasers will be integrated with photodetectors by using micro-fabrication techniques in the University of British**Columbia (UBC) laboratories located in the Stewart Blusson Quantum Matter Institute (SBQMI). These**techniques will involve a combination of traditional photolithography and device bonding techniques and less**traditional approaches such as laser micromachining. These integrated sensors will be field tested by the**industrial partner in partnership with UBC students and researchers.