Development of a moiré-fringe-based nano-positioning system for fabricating high-efficiency x-ray Fresnel zone plates

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Fabrication of highly efficient x-ray optical devices is currently a challenge in both manufacturing and instrumentation. This NSERC Alliance project aims to collaboratively investigate high-precision nano-positioning using an optical imaging approach via an academia-industry collaboration among INRS, Applied Nanotools Inc. (ANT), and Axis Photonique Inc. (AP). The main goal is to demonstrate a moiré-fringe-based optical imaging method to align two Fresnel zone plates (FZPs) with sub-20 nm alignment accuracy. In total, three Aims are proposed, which involve simulating characteristics of moiré fringes due to misalignment, developing an optical imaging system for nano-positioning, demonstrating sub-20 nm alignment in aligned FZP pair, and testing it in an x-ray imaging system. INRS, ANT, and AP will provide necessary and complementary expertise that encompasses all research tasks proposed in this application. All sides are committed to frequent interaction and communication to ensure the progress of this project and to facilitate the technology transfer. Aiming to demonstrate the proposed light-based nano-positioning technique for the advanced fabrication of x-ray optical devices, this Alliance project is expected to significantly benefit ANT by reducing operating expenses, increasing operational safety, producing more efficient FZPs, and opening new markets based on the new capabilities for high-energy x-ray imaging. The high-efficiency FZPs will also assist AP in its current effort of two-dimensional x-ray ultrafast imaging. Thus, these benefits will boost the sales of both ANT and AP to solidify their current technical team with the potential to open new positions and further enhance their reputations in the field of x-ray optics. All these activities will support the future knowledge-based economy of Canada.