Development of a moiré-fringe-based nano-positioning system for fabricating high-efficiency x-ray Fresnel zone plates

开发基于莫尔条纹的纳米定位系统，用于制造高效 X 射线菲涅尔波带板

• 批准号: 549833-2020
• 负责人: Liang, Jinyang
• 金额: $ 2.19万
• 依托单位: Institut national de la recherche scientifique
• 依托单位国家: 加拿大
• 项目类别: Alliance Grants
• 财政年份: 2020
• 资助国家: 加拿大
• 起止时间: 2020-01-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=700854
• 关键词: Development; moir; fringe; based; nano

Fabrication of highly efficient x-ray optical devices is currently a challenge in both manufacturing and instrumentation. This NSERC Alliance project aims to collaboratively investigate high-precision nano-positioning using an optical imaging approach via an academia-industry collaboration among INRS, Applied Nanotools Inc. (ANT), and Axis Photonique Inc. (AP). The main goal is to demonstrate a moiré-fringe-based optical imaging method to align two Fresnel zone plates (FZPs) with sub-20 nm alignment accuracy. In total, three Aims are proposed, which involve simulating characteristics of moiré fringes due to misalignment, developing an optical imaging system for nano-positioning, demonstrating sub-20 nm alignment in aligned FZP pair, and testing it in an x-ray imaging system. INRS, ANT, and AP will provide necessary and complementary expertise that encompasses all research tasks proposed in this application. All sides are committed to frequent interaction and communication to ensure the progress of this project and to facilitate the technology transfer. Aiming to demonstrate the proposed light-based nano-positioning technique for the advanced fabrication of x-ray optical devices, this Alliance project is expected to significantly benefit ANT by reducing operating expenses, increasing operational safety, producing more efficient FZPs, and opening new markets based on the new capabilities for high-energy x-ray imaging. The high-efficiency FZPs will also assist AP in its current effort of two-dimensional x-ray ultrafast imaging. Thus, these benefits will boost the sales of both ANT and AP to solidify their current technical team with the potential to open new positions and further enhance their reputations in the field of x-ray optics. All these activities will support the future knowledge-based economy of Canada.

制造高效的X射线光学器件目前在制造和仪器仪表方面都是一个挑战。该NSERC联盟项目旨在通过INRS，Applied Nanotools Inc. (ANT)和Axis Photonique Inc.（美联社）主要目标是展示一种基于莫尔条纹的光学成像方法，以20 nm以下的对准精度对准两个菲涅耳波带片（FZPs）。总的来说，提出了三个目标，其中包括模拟由于未对准的莫尔条纹的特性，开发用于纳米定位的光学成像系统，在对准的FZP对中演示亚20 nm对准，并在X射线成像系统中对其进行测试。INRS，ANT和AP将提供必要的和互补的专业知识，包括本申请中提出的所有研究任务。各方致力于经常性的互动和沟通，以确保该项目的进展，并促进技术转让。 该联盟项目旨在展示用于先进制造X射线光学器件的基于光的纳米定位技术，预计将通过降低运营成本、提高运营安全性、生产更高效的FZP以及基于高能X射线成像的新功能开辟新市场，使ANT受益匪浅。高效FZPs还将协助AP目前在二维X射线超快成像方面的努力。因此，这些好处将促进ANT和AP的销售，巩固他们现有的技术团队，有可能开设新的职位，并进一步提高他们在X射线光学领域的声誉。所有这些活动都将支持加拿大未来的知识型经济。