Fabrication of Circular Heat Source Sensors for Thermal Characterization

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For many industries, it is important to be able to accurately measure the thermal properties of the materials used in various pieces of equipment. Heat management is a major issue in processes ranging from the operation of turbines in generators to the operation of microelectronic chips. Thermal coatings help to manage and control heat, and also to save energy (e.g. thin film coatings on windows). As new materials and coating methods are developed for these and other applications, reliable methods to precisely measure the properties of these coatings are needed. While there are well-established methods for measuring the properties of bulk materials, coatings and thin films remain a challenge mainly due to the relative large heat capacity of the sensor. C-Therm Technlolgoies is a Canadian company that designs, builds, and supplies thermal analysis equipment for a variety of industrial and academic customers. In recent years C-Therm, in collaboration with academic partners, has designed new thermal sensors with very low heat capacity for the characterization of thin films. In the proposed project, the Elias Research Group at the University of Alberta will develop a reliable and repeatable process to fabricate these sensors. This process will be implemented using the tools available at the University of Alberta Nanofabrication Facility (nanoFab). These tools include advanced thin film deposition systems, and optical lithography instruments. During the project, the academic and industrial partners will meet regularly to discuss progress. Devices fabricated at the U of A will be characterized at C-Therm. The main outcome of the research will be a process that can be used to fabricate devices that can be included in C-Therm's product portfolio.