Advancing thin-film materials processing for flexible sensor fabrication

推进柔性传感器制造的薄膜材料加工

• 批准号: 560732-2020
• 负责人: Zhou, Norman
• 金额: $ 7.88万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Alliance Grants
• 财政年份: 2020
• 资助国家: 加拿大
• 起止时间: 2020-01-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=707173
• 关键词: Advancing; thin; film; materials; processing

The collaboration between the University of Waterloo and Forcen aims to develop scalable, flexible force-sensing films using advanced thin-film fabrication methods. Conventionally manufactured force sensing films, including those developed by Forcen, enable the increasing adoption of smart robotics in the medical, aerospace, and manufacturing industries. However, with increasing demand for custom sensors and rapid sensor deployment, a digital manufacturing methodology is required. Research into metal and polymer thin-film deposition, thin-film patterning, and thermal treatment of thin-film layers looks to advance the processing of thin-film materials to allow for faster transition between custom sensor design and final product. The aim of this research is to further our understanding of the relationship between thin-film processing techniques, and both surface chemistry and surface physics. The bonding of metals and polymers involves complex mechanisms that depend on surface functional groups and their interaction with metal oxides, which can be altered - both intentionally and unintentionally - during processing. Additionally, we aim to expand our understanding of the surface chemistry's influence on physical interactions that occur at thin-film interfaces during processing. Advances in these areas will not only significantly reduce manufacturing times, but also improve sensor shielding, thermal stability, and environmental resistance. The outcome of this project will place a Canadian company - Forcen - at the forefront of smart industrial robotics with integrated force-sensing technologies, and place a Canadian university - the University of Waterloo - at the forefront of thin-film sensor research.

滑铁卢大学和Forcen之间的合作旨在使用先进的薄膜制造方法开发可扩展的，灵活的力传感薄膜。传统制造的力传感薄膜，包括Forcen开发的薄膜，使智能机器人技术在医疗、航空航天和制造业中的应用越来越多。然而，随着对定制传感器和快速传感器部署需求的增加，需要数字化制造方法。对金属和聚合物薄膜沉积、薄膜图案化和薄膜层热处理的研究旨在推进薄膜材料的加工，以实现定制传感器设计和最终产品之间的更快过渡。 这项研究的目的是进一步了解薄膜加工技术之间的关系，表面化学和表面物理。金属和聚合物的结合涉及复杂的机制，取决于表面官能团及其与金属氧化物的相互作用，这些官能团在加工过程中可能会有意或无意地发生变化。此外，我们的目标是扩大我们的理解的表面化学的物理相互作用，在加工过程中发生在薄膜界面的影响。 这些领域的进步不仅可以显著缩短制造时间，还可以提高传感器的屏蔽性、热稳定性和耐环境性。该项目的成果将使一家加拿大公司Forcen处于智能工业机器人与集成力传感技术的最前沿，并使加拿大大学滑铁卢大学处于薄膜传感器研究的最前沿。