Advanced Micromachined Ultrasonic Transducers for High Performance Medical Imaging Systems

用于高性能医疗成像系统的先进微机械超声波换能器

• 批准号: RGPIN-2018-03998
• 负责人: Emadi, Arezoo
• 金额: $ 2.04万
• 依托单位: University of Windsor
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2020
• 资助国家: 加拿大
• 起止时间: 2020-01-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=712303
• 关键词: Advanced; Micromachined; Ultrasonic; Transducers; Performance

Breast cancer is a leading cause of death in women that is often undetected and underdiagnosed, contributing to the significant death rate of more than 21% of all female cancer deaths [Canadian Cancer Society Statistics 2017]. Amongst all diagnostic techniques, magnetic resonance imaging provides a more accurate estimate of tumor size. However, its cost, poor accessibility and inapplicable nature for patients with some implanted medical devices restrain its usage. Therefore, there is a momentous need to develop an accurate, safe and low-cost system that makes the examination procedure more frequently available to a larger portion of women across the world. Advance ultrasound imaging systems are emerging as essential and practical tools in routine clinical practices due to their nonionizing and noninvasive nature and lower cost. The crucial component of these ultrasound systems is the ultrasonic transducer and a promising candidate technology to advance state-of-the-art ultrasound imaging is capacitive micromachined ultrasonic transducer, CMUT. These transducers bring advanced microelectromechanical system (MEMS) fabrication technology to the field of ultrasound imaging and overcome the fabrication limitations of many bulk piezoelectric transducers. They offer batch production, which reduces the cost, tight parameter specification, wide bandwidth and achievable CMOS integration. However, they fall short particularly with output acoustic pressure, performance compromise between transmitting and receiving modes and their demand for high bias voltage. In this research program and in contrast with traditional MEMS transducers, the focus is on an innovative micromachined transducer configuration where more than one deflectable plate is employed in the CMUT cell structure. The unifying theme is to exploit the unique opportunity given by contribution of two or more vibrating membranes in transmitting and receiving ultrasonic signals. To reach this goal comprehensive analytical and numerical model will be developed; physical properties of multiple vibrating plates will be optimized; various fabricating techniques as well as packaging will be assessed; prototype devices will be fabricated; array configurations will be probed and electrical and acoustic properties of these transducers will be analyzed. This research program is designed to address many of unique concerns of conventional CMUTs including providing dynamic switching between different modes, enhancing output pressure and lowering the driving voltage. The wide implication of this program offers many attractive applications including diagnostic imaging and therapeutic applications that provide enhanced health care to Canadian. Training of highly qualified personnel with a diverse set of skills is the essential component of this research proposal that will benefit Canadian private and public sectors.

乳腺癌是女性的主要死亡原因，通常未被发现并被诊断出诊断不足，导致所有女性癌症死亡人数超过21％的死亡率[加拿大癌症社会统计局2017年]。在所有诊断技术中，磁共振成像提供了更准确的肿瘤大小估计值。但是，对于患有某些植入医疗设备的患者，其成本，不可访问性和不适用性限制了其使用情况。因此，需要开发一种准确，安全和低成本的系统，这使世界上大部分女性更频繁地使用检查程序。 Advance超声成像系统由于其非离子化和非侵入性和较低的成本而成为常规临床实践中必不可少的实用工具。这些超声系统的关键组成部分是超声传感器，并且有前途的候选技术可以推进最新的超声成像，这是电容性微机械超声传感器CMUT。 这些传感器将高级微电动系统（MEMS）制造技术带到超声成像领域，并克服许多散装压电传感器的制造限制。他们提供批处理生产，可降低成本，紧密的参数规范，宽带宽度和可实现的CMOS集成。但是，它们尤其在输出声压力下掉落，在传输和接收模式之间的性能妥协以及对高偏置电压的需求。 在该研究程序和传统的MEMS换能器中，重点是创新的微机械换能器配置，该配置在CMUT细胞结构中采用了多个可转移的板。统一的主题是利用两个或多个振动膜在传输和接收超声信号时的贡献。为了实现这一目标，将开发全面的分析和数值模型；将优化多个振动板的物理特性；将评估各种制造技术以及包装；原型设备将被制造；将探测阵列配置，并分析这些传感器的电气和声学特性。该研究计划旨在解决传统CMUT的许多独特问题，包括在不同模式之间提供动态切换，增强输出压力并降低驾驶电压。 该计划的广泛含义提供了许多有吸引力的应用程序，包括诊断成像和治疗应用，可为加拿大提供增强的医疗保健。培训具有多种技能的高素质人员是该研究建议的重要组成部分，该计划将使加拿大私营部门受益。