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An electron cyclotron resonance plasma source for surface modification of polymers, diamond and diamond-like films

An electron cyclotron resonance plasma source for surface modification of polymers, diamond and diamond-like films
用于聚合物、金刚石和类金刚石薄膜表面改性的电子回旋共振等离子体源
批准号:
133942-1992
负责人:
Lau, Leo
金额:
$8.35万
依托单位国家:
加拿大
项目类别:
Strategic Grants - Equipment (H)
财政年份:
1992
资助国家:
加拿大
项目状态:
已结题
起止时间:
1992-01-01 至 1993-12-31

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  • 财政年份:
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  • 项目类别:
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