Energy-Dispersive X-ray Spectrometer and Electron Backscattered Diffractometer for Scanning Electron Microscopy Research

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Information of microstructure and chemistry of a material or device is critical in many fields of research. The scanning electron microscope (SEM) is arguably one of the most widely used and powerful characterization instruments for obtaining such microstructural information, from millimeter down to nanometer length scales. Elemental composition of the specimens, and crystallography of crystalline materials are of great importance for applications in advanced manufacturing, bio-imaging and life science, energy, environment and health, mining, geology and petrology, semiconductors and microeletronics. In an SEM, a focused electron beam scans across the surface of a specimen and produces reflected electrons that reveal topographic, crystallographic and morphological information. Specifically, the crystalline information can be obtained from backscattered electrons only if the SEM is equipped with an electron backscattered diffractometer (EBSD). Concomitantly, the so-called "characteristic X-rays" with sharply defined energies are also emitted as a result of the incident electron beam's interaction with the specimen. The characteristic X-rays can be employed for identification and quantification of elements using energy-dispersive X-ray spectroscopy (EDS). University of Toronto has recently acquired a state-of-the-art high-resolution SEM which has been used daily by more than forty researchers (mostly HQP) for over sixty research programs. Without the EDS, we cannot obtain elemental information. Without the EBSD, no crystalline information is available. We hereby request the funds to purchase an EDS detector and an EBSD, which are two essential accessories urgently needed for conducting cutting-edge SEM research at our shared user facility. The addition of proposed instrumentation will support even a broader range of NSERC-funded research programs in advanced manufacturing, energy conversion and production, and forensics, represented by the Application Team (Jane Howe, Doug Perovic, and Cathy Chin) and collaborator Yu Zou. The proposed instrument will be located at the Open Centre for the Characterization of Advanced Materials (OCCAM) shared user facility, and maintained by dedicated personnel. Measures will be taken to ensure the proposed instrumentation has the highest possible degree of utilization and accessibility by all interested researchers per EDI principles. The Applicants and OCCAM have a proven track record in mentoring diverse highly qualified personnel (HQP) in an inclusive research environment and are committed to further break down hidden barriers in research space. HQP will use the state-of-the-art equipment to solve critical problems in the fields of catalysis and energy conversion, corrosion, forensic engineering, materials science, and nuclear energy. They will gain first-hand experience to work with fundamental research coupled with applied, industrially relevant projects.