用于微弱紫外光信号探测的高性能MgZnO日盲紫外雪崩光电二极管设计、制备与应用研究

日盲紫外光（220-280nm）探测技术在臭氧空洞环境监测、导弹预警、火焰探测等方面具有广阔的应用前景。日盲紫外光信号微弱，背景噪声强，因此需要探测器件的光响应度和信号噪声比很高才可以对日盲紫外光实现有效探测。雪崩光电二极管在强电场作用下具有很高内增益，光响应度非常高，并且这种器件具有很低的暗电流，因此信号\噪声比例很高。本项目通过在立方MgZnO薄膜上制备Au\MgO\MgZnO肖特基型日盲紫外雪崩光电二极管大幅度提高探测器在日盲紫外光照射下的光电流和光响应度，降低紫外探测器的暗电流,从而大幅度提高探测器在紫外光照射下的光电流与暗电流的比例,提高探测器的紫外/可见抑制比和信号/噪声比，为实现在强可见光和高噪声背景下对微弱日盲紫外光信号的有效探测开发新技术,为环境监测、导弹预警、火焰探测等领域提供可行的解决方案

Solar-blind UV (220-280nm) detection technology has broad application prospects in the ozone hole environmental monitoring, missile warning, flame detection ,and so on. Solar-blind UV light signal is weak under strong noise background on surface of the earth. So it need high photoresponse and signal-to-noise ratio of detector to conduct effective detection to solar-blind UV light. The avalanche photodiode has high internal gain and a very high degree of light response at high electric field, and because dark current of the device is low, signal \ noise ratio of avalanche photodiode is high. The project conducts the preparation of Au \ MgO \ MgZnO Schottky-type solar-blind ultraviolet avalanche photodiodes to greatly improve photocurrent and optical responsivity of the detector, reduce the dark current of the UV detector to dramatically improve the photocurrent\dark current ratio, and the UV / visible suppression ratio and signal / noise ratio of the detector could get great improvement. This project could develop new technologies for effective detection to faint UV signal in the context of strong visible light and high noise background, provides a viable solution for environmental monitoring, missile warning, flame detection field,and so on.