空投声呐浮标和水下小尺寸武器平台对高性能、小体积复合式矢量水听器提出了迫切需求。针对目前纤毛式MEMS仿生矢量水听器不能测量声压信息，目标方位估计存在左右舷模糊的问题，本项目提出声场声压及声压梯度信息复合敏感方式，形成单边指向性；针对目前水听器的声压梯度灵敏度和工作频带相互制约的问题，本项目提出四元阵列敏感微结构，实现对矢量信息高灵敏宽频带的测量。将两者有机结合，优势互补，提出一种高灵敏宽频带声压/声压梯度复合式MEMS水听器，解决基于声压/声压梯度信息的声源方位敏感机制以及四元阵微结构灵敏度与频响范围之间的耦合关系这两个关键科学问题；开发一套非平面微结构一体化加工工艺，完成系统集成，最终实现MEMS矢量水听器灵敏度提高10～15dB，频响范围拓展2～4倍，满足声场多参量测量的需求，具有分辨左右舷、高灵敏宽频带的特点，为MEMS水听器的工程应用奠定理论和技术基础。

There is an urgent need to develop a hybrid vector hydrophone with high performance and small volume for the air-dropped sonobuoy and the underwater small weapon platform. In order to solve the problem that the cilium MEMS bionic vector hydrophone can’t measure the information of acoustic pressure and there exists the problem of port and starboard ambiguity in the Direction of Arrival estimation, A hybrid sensitive way that is composed of the information of the acoustic pressure/pressure-gradient is proposed to form unilateral directivity. In order to solve the problem that sensitivity and working frequency bandwidth of the current cilium MEMS vector hydrophone are constrained, a four-element array sensitive microstructure is proposed, which realizes the acoustic pressure-gradient measurement with high sensitivity and wide bandwidth. The acoustic pressure/pressure-gradient hybrid MEMS hydrophone with high sensitivity and wide frequency bandwidth is put forward to solve two key scientific problems, one is the sensitive mechanism of acoustic direction based on acoustic pressure/pressure-gradient information, and the other is the coupling relationship between the sensitivity and the frequency response range of the four-element array microstructure. The purpose of this project is to develop a non-planar microstructure manufacturing technology and complete the system integration. Finally the sensitivity of the MEMS vector hydrophone is expected to be improved by 10～15dB, with the frequency response range expanded 2~4 times, which could meet the need of multi-parameters measurement in acoustic field. Therefore, the proposed acoustic pressure/pressure-gradient hybrid MEMS hydrophone has the characteristic of distinguishing the port and starboard, high sensitivity and wide frequency bandwidth. This project would lay a theoretical and technological foundation for the engineering application of MEMS hydrophone.