MEMS惯性器件是航天器运动载体测控系统中的关键部件。目前，我国多个宇航项目均对MEMS惯性器件提出了明确需求，对其寿命要求长达5~10年。而国内对MEMS惯性器件空间环境效应的研究明显滞后，大大限制其空间应用。空间辐射环境是影响MEMS惯性器件在轨性能的最严重因素。在空间辐射环境中，MEMS惯性器件会产生多种辐射效应及其协和效应，在器件内部产生大量辐射缺陷。这些辐射缺陷可通过相互作用或与杂质原子结合形成缺陷复合体，严重影响器件的在轨性能。研究MEMS惯性器件内部损伤缺陷的动态演化行为是进行空间辐射损伤机理研究的基础。因此，本项目以航天用MEMS惯性器件（加速度计）作为研究对象，基于不同类型粒子辐射条件，深入研究MEMS惯性器件电离辐射效应、位移辐射效应以及协和效应的基本特征，揭示协和效应损伤机理，建立基于辐射缺陷动态演化规律的MEMS惯性器件空间辐射协和效应损伤模型。

MEMS inertial device is the key device in space motion vector measurement and control system. Nowadays, a large number of space missions in China have requested that the lifetime of MEMS inertial device on orbit should be 5-10 years. However, space environment effects on MEMS inertial device did not be researched. This situation has restricted its space application. Radiation environment is the most important environment which affected the performance degradation of MEMS inertial device in space. In space radiation environment, there are many radiation effects and synergistic effect. These effects will produce a large number of radiation defects in MEMS device. These defects interact with each other or impurity atom to produce the stable defect complexes, and affect the performance of MEMS device. Dynamic evolution behavior of the radiation defects is the basis of the space radiation effects and mechanism. Therefore, MEMS inertial device (accelerometer) used in space is chosen as the sample. Various kinds of particles is used as the radiation source to study the ionization, displacement and synergistic effect. Based on the dynamic evolution of radiation defects, simulation model of spatial radiation synergistic effects will be built.