AlIn(Ga)N外延生长中的反应扩散问题

本项目从斑图动力学理论的角度出发研究(Al,In,Ga)N材料外延生长表面的反应扩散问题。结合理论分析、计算机模拟和实验验证的方法，分析和研究(Al,In,Ga)N材料生长过程中表面形貌的演变和In组分在生长平面内以及生长方向上的空间分布，从而确定(Al,In,Ga)N材料的相分离发生的时间和方式，找到控制相分离的有效办法。从表面形貌演变研究中找到生长参数对微观物理过程的影响规律，探索生长表面In的时空分布对材料生长进程的影响。

Reaction-Diffusion problem happened on the growing surface of (Al,In,Ga)N will be investigated using dynamics of pattern formation. Multi methods, including theoretical analysis, numerical simulation, and experimental verification will be used to explore the evolution of surface morphologies and the spatio-temporal distribution of Indium during the growing process of (Al,In,Ga)N materials by MOCVD. Study on phase separation of (Al,In,Ga)N materials is the focus of this project, with the aim to find efficient approach of controlling and modifying the phase separation of (Al,In,Ga)N materials. The phase separation started at which stage of material preparation process and it evolved in what a way was two important subjects to be deeply analyzed in order to clarify the deterministic relationship between Indium distribution pattern and the growth conditions. Study on temporal evolution of surface morphology of growing surface will be conducted to probe the basic physical process happened on the growing surface. Effects of patterns formed on the surface on the growing process also will be investigated.