纳米切削材料去除机理和极限加工能力研究是推动纳米切削加工技术发展的关键，项目拟开展基于聚焦能量束（离子、电子、光子）技术的金刚石刀具纳米切削机理及其制造完整性的研究。建立聚焦离子束/扫描电镜(FIB/SEM)双束系统在线纳米切削及切削力在线检测平台，围绕纳米切削材料去除机理、极限切削能力、单晶硅纳米切削中金刚石刀具磨损抑制策略、加工亚表面相变和微裂纹等损伤分布规律及其有效修复方法等研究内容，深入开展聚焦能量束纳米制造及微观表征分析。结合FIB原位纳米减薄技术与EBSD、拉曼光谱等能量束微观表征技术，阐明纳米切削加工的亚表面损伤分布规律，开展亚表面损伤的飞秒激光修复研究。阐明刀具刃口锋锐度与加工质量的协同竞争机制，建立纳米切削材料去除模型、提高纳米切削制造完整性和极限加工能力的策略。项目的实施将有助于把特种加工三束技术与超精密加工技术有机融合，推动纳米切削技术和相关机理研究更好的发展。

The research of nano-cutting mechanism is the key of pushing forward the technology development of nano-manufacturing. The project will focus on the research of nano-cutting mechanism and its manufacturing integrity based on the focused energy beam technology (electron, ion, photon). The optimized design of the nano-cutting platform which is based on the dual beam system(FIB/SEM) will be conducted in the project. The key tasks, such as nanocutting online observations by SEM, manufacturing quality and the analysis of the integrity in-situ characterization, which exist in the progress of nano-cutting, will be researched in the project. Besides, the research of the technology of nano-manufacturing and microscopic characterization using the focused energy beam will be conducted for the research of the nano-cutting. The competitive and coordinated features among the tool edge, cutting specific energy and surface quality will be clarified to optimize and guide the manufacturing of the diamond tools for nano-cutting. The FIB original thinning and EBSD, Raman spectra of microscopic energy beam characterization techniques will be combined to explain the distribution of the subsurface damage, and the research of the recovery of surface damage by femtosecond laser will be conducted. Also, the exploratory research of improving the ultimate cutting ability will be conducted. The nano-cutting models of the diamond tools will be initially established by the way of combining the characterization analysis with theoretical simulation of the material modification of the edge pushing zone. The nano-cutting technology specifications and manufacturing strategy of improving the integrity of the nano-cutting will be explored to establish by the way of combining the focused energy beam technology with the ultra-precision cutting.