具有超薄、超光滑、超硬、良好耐磨性的四面体非晶碳膜(ta-C)是目前获得超高密度、大容量数据存储器和高可靠、低摩擦、长寿命运行微电子机械系统金属部件用关键润滑防护改性材料。磁过滤阴极电弧技术是制备ta-C碳膜的主要方法，然而由于石墨阴极弧斑不规则放电机理，大颗粒协同沉积污染严重，薄膜质量差。本项目采用自主研制的45度双弯曲磁过滤阴极电弧复合技术，设计制备超薄ta-C碳膜，改变沉积参数实现薄膜微结构和性能调控，通过对薄膜动力学生长、微结构、力学和摩擦学物性的演变规律研究，结合分子动力学模拟计算，旨在阐明超薄ta-C膜的生长机制及摩擦润滑机理，建立获得超硬、超光滑、低摩擦的高质量超薄ta-C膜可控制备方法，同时发展一种无损、快速、准确测量超薄ta-C碳键态结构与含量（sp3/sp2）的椭偏表征新方法，为研究发展金属表面改性用高性能碳膜材料的设计、制备、表征提供理论依据和方法。

Ultrathin tetrahedral amorphous carbon (ta-C) films, owning high hardness, good wear and corrosion resistance properties, are considered to be the best candidate as protective and lubricant coatings to meet the increasing demands of ultrahigh density and capacity data storage devices and MEMS components. Currently, magnetic filtering cathodic vacuum arc (FCVA) deposition technique is the most promising one due to its high ionization and high density plasmas, however, the co-deposited macro-particles is the key barrier to obtain ultrathin ta-C films with high performance. In this project, we focus on the study of deposition, characterization and friction behavior of the ultrathin ta-C films by a hybrid homemade deposition system, which is composed of a novel developed 45º double bent FCVA source and a DC magnetron sputtering source. Specifically, the influence of key deposition parameters (ion kinetic energy, density, distribution of plasmas and so on) on the evolution of kinetic growth, sp3/sp2 atomic bonds, and microstructure of ultrathin ta-C films are investigated systematically. Meanwhile, the mechanical and tribological properties of films are studied as well. Most importanly, molecule dynamics simulation (MD) from atomic scale viewpoint is employed to reveal the kinetic motion behaviors of deposited particles in the surface and interface region. Based on the experimental and calculation results, we aim to clarify the deposition mechanism and low friction lubrication mechanism of ultrathin ta-C films, to develop the novel synthesis techinque for ultrathin ta-C films with superhigh hardness, supersmooth surface, low friction coefficient and good wear resistance, to establish a novel non-destructive, fast, accurate ellipsometry characterizition method for carbon atomic bonds, and to provide the theroretical and experimental basis for designing and preparation ultrathin ta-C films with high performance to meet the lubricant coating demands of MEMS,data storage,and related components.