由金属纳米结构而产生的表面增强拉曼散射（SERS），极大的推动了拉曼光谱技术在生物学领域的应用。拥有纳米结构的基底通常被称为SERS活性基底。目前，采用纳米机械加工技术虽然可以制备重复性良好、可长久保存的纳米阵列结构，但是在制备SERS活性基底方面，还存在加工效率较低、加工尺度小、加工阵列结构的机理不明晰、结构形式单一等问题。因此，本项目首先提出了力调制原理的纳米压痕/刻划高效加工新方法；通过理论仿真，揭示由材料堆积的叠加而形成规则纳米结构的机理；并建立基于探针力调制原理的纳米机械加工系统，优化加工工艺，实现跨尺度复杂纳米阵列结构的高效加工。然后，利用罗丹明（R6G）作为标记物分析SERS活性基底上的纳米阵列结构的形状、尺寸特性对拉曼信号强度的增强机制，进一步建立典型生物分子与SERS活性基底上的纳米阵列结构的对应关系。本项目的研究成果将促进拉曼光谱技术更加广泛的应用到生物分子的检测领域。

Surface-enhanced Raman scattering (Surface Enhanced Raman Scattering, SERS) has greatly promoted the application of the Raman spectroscopy in the field of biology. The substrates with such kind of nanostructures are usually called as the SERS-active substrates. Currently, by the use of the nanomechanical machining technology, the good reproducibility of the nano-array structures, which can be preserved for a long-term, has been achieved. However, when the nanomechanical machining technique is used to machine the SERS-active substrate, there are still some shortcomings, such as a low processing efficiency, a limited processing scale, and a simple type of the machined nanostructures. The machining mechanism of the nano-array structures based on the nanomechanical machining method is still not clear. Therefore, the project first proposes a novel nanoindentation/nanoscratching machining method based on the force modulation principle with a high machining efficiency. The theoretical simulations reveal the mechanism of the regular nano-array structures owing to the superimposition of the pileups on the sides of the nanodots or nanogrooves. A nanomachining system based on the force modulation principle is established and the complex cross-scale nano-array structures are efficiently machined with the optimized parameters. The rhodamine 6G (R6G) is then used as a marker to study the effects of the dimensional characteristics of the nano-array structures on the SERS-active substrate on the intensity enhancement of the Raman signals. Finally, the relationships between the nano-array structures and the specific molecules are obtained based on a plenty of experiments. Generally, this project will contribute to a wider application of the Raman spectroscopy technique in the field to detect biological molecules.