液气界面张力垂直分量的检测在液滴蒸发微制造领域中十分重要，该分量可以引起软基体变形。而现有接触角测试技术却不能对其直接测量。并且Yong方程描述液气界面张力在水平方向的平衡关系，而忽略了其垂直分量。为此，拟采用具有柔性结构的微梁替代传统刚性表面，并结合视频技术搭建了一种新型液滴蒸发过程的液气界面张力测试系统。利用该系统对不同亲疏水性质的微梁表面对单组分和双组分液滴蒸发进行研究，同时获得接触角和表面应力两种参数。从液滴成分和界面亲疏水性质两个方面，研究液滴蒸发过程中液气界面性质对微梁弯曲的影响，并建立液滴成分和微梁表面张力的关系。此外，通过理论与实验相结合，建立液滴在液气表面张力的垂直分量产生的数值模型。本课题从全新的视角为液滴蒸发过程中液气界面张力建立一套新型测试系统，同时也为发展微梁传感技术研究提供了一个新思路。

The liquid-gas interfacial tensions is especial important in micro-manufacturing based on the droplet evaporation and can cause deformation of soft matrix. However the existing contact angle measurement technology cannot measure it directly. Yong equation is commonly used to reflect the liquid-gas interfacial tensions balance in the horizontal direction, ignoring the vertical component of the liquid-gas interfacial tension. For this reason, combining with video technology, a new liquid-gas interfacial tension test system of droplet evaporation is built which use the flexible structure of microcantilever instead of the traditional rigid surface. The evaporation of pure water droplet and ethanol solution on the gold surface of microcantilever with different hydrophilic and hydrophobic properties was observed by this test system, and the contact angle and bending of microcantilever from these experiments were obtained. From the properties of droplet and properties of hydrophilic and hydrophobic, we investigate on the influence of the liquid-gas interfacial tension in evaporation procession, and establish the relationship between the droplet composition and surface tension of the microcantilever. In addition, a numerical model was established to determine the relationship between the vertical component of the liquid-gas interfacial tension and bending of microcantilever from vertical component to verify the experimental result. This project not only provides a new test system for the vertical component of the liquid-gas surface tension, but also gives a new direction for the development of microcantilever sensing technology.