Piezoelectric circuitry tailoring for resonant mass sensors providing ultra-high impedance sensitivity
Piezoelectric circuitry tailoring for resonant mass sensors providing ultra-high impedance sensitivity
复制标题
专为谐振质量传感器定制的压电电路，提供超高阻抗灵敏度
DOI：
10.1016/j.sna.2018.11.032
复制
发表时间：
2019
期刊：
影响因子：
--
通讯作者：
Liu Pengbo
中科院分区：
文献类型：
--
作者：
Zhao Jian;Wen Xin;Huang Yu;Liu Pengbo
对于压电式质量传感器，与扫频法相比，以固定频率监测阻抗变化的方法在简化测量过程和提高稳健性方面显示出很大的潜力。然而，由于机械、压电和电学参数之间的高度耦合效应，提高这种阻抗灵敏度是困难的。利用等效电路理论，建立了基于阻抗的压电式传感器灵敏度解析模型。为此，提出了一种通过增加额外的电路元件来剪裁压电电路来提高灵敏度的新方法。为了进行实验验证，制作了长度为21.0 mm、电感为0.60H的压电式悬臂梁传感器，并进行了测试。为了便于比较，引入了同一单元的两个无量纲灵敏度来评价提高效率的灵敏度。阻抗比灵敏度可达188.3/g，比频率比灵敏度2.3g/g提高了近81.9倍，比无电感时的43.6g/g提高了约4.3倍，充分验证了这种增敏方法的有效性。
For piezoelectric mass sensors, the method of monitoring the impedance change at a fixed frequency have shown great promise for simplifying the measuring process and improving the robustness, as compared to the frequency sweeping method. However, it is difficult to improve such impedance sensitivity due to the highly coupling effect among the mechanical, piezoelectric and electric parameters. In this paper, an analytical impedance based sensitivity model is established by using the equivalent electric circuit theory for piezoelectric sensors. Hence, a novel sensitivity improving method is proposed through tailoring the piezoelectric circuitry by adding extra electric circuit components. For experimental validation, a piezoelectric cantilever sensor with a 21.0 mm long cantilever connected with 0.60 H inductance is fabricated and tested. For easy comparison, two dimensionless sensitivities with the same unit are introduced to evaluate the sensitivity improving efficiency. The impedance ratio sensitivity can reach 188.3/g, which is nearly 81.9 times greater than that of the frequency ratio sensitivity of 2.3/g, and also is about 4.3 times greater than that of 43.6/g obtained without any inductance, thus adequately verifying the effectiveness of such sensitivity enhancement method.
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DOI：
10.1109/58.808881
发表时间：
1999
期刊：
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
影响因子：
--
作者：
J. Vig;Yoonkee Kim
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J. Vig;Yoonkee Kim
DOI：
10.1106/qxmv-r3gc-vxxg-w3aq
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2000-06-01
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2.7
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Park, G;Cudney, HH;Inman, DJ
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Inman, DJ
DOI：
10.3390/s90806046
发表时间：
2009
期刊：
Sensors (Basel, Switzerland)
影响因子：
--
作者：
Ansari MZ;Cho C
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Cho C
DOI：
10.1109/tmech.2016.2530619
发表时间：
2016-02
期刊：
IEEE/ASME Transactions on Mechatronics
影响因子：
--
作者：
Zhengbao Yang;J. Zu;Zhuo Xu
通讯作者：
Zhengbao Yang;J. Zu;Zhuo Xu
影响因子：
38.3
作者：
Li, Mo;Tang, H. X.;Roukes, M. L.
通讯作者：
Roukes, M. L.