Investigation to the Carrier Transport Properties in Heterojunction-Channel Amorphous Oxides Thin-Film Transistors Using Dual-Gate Bias

Investigation to the Carrier Transport Properties in Heterojunction-Channel Amorphous Oxides Thin-Film Transistors Using Dual-Gate Bias
复制标题

双栅偏压异质结沟道非晶氧化物薄膜晶体管载流子传输特性研究

DOI:
10.1109/led.2022.3223080
复制
发表时间:
2023-01
影响因子:
4.9
通讯作者:
Shengdong Zhang
Shengdong Zhang
中科院分区:
工程技术2区
文献类型:
--
作者:
Huan Yang;Xiaoliang Zhou;Lei Lu;Shengdong Zhang

文献摘要

参考文献

相似文献

研究了双层非晶氧化物半导体(AOS)异质结薄膜晶体管(TFT)的载流子输运特性。这种异质结沟道的迁移率表现出明显的顶栅(TG)电压(<inline-formula><tex-math notation="LaTeX">$V_{\text {TG}}$</tex-math></inline-formula>)和底栅(BG)电压(<inline-formula><tex-math notation="LaTeX">$V_{\text {BG}}$</tex-math></inline-formula>)的依赖性。在TG模式下,迁移率保持良好,其中<inline-formula><tex-math notation="LaTeX">V_{\text {TG}}$</tex-math></inline-formula>与异质结界面处形成的电子势阱(PW)的内建电场一致。相反,增加的<inline-formula><tex-math notation="LaTeX">$V_{\text {BG}}$</tex-math></inline-formula>逐渐将高迁移率降低到单层沟道的水平,因为与PW相反方向的高<inline-formula><tex-math notation="LaTeX">$V_{\text {BG}}$</tex-math></inline-formula>可以消除PW。这从实验上阐明了AOS异质结沟道的高迁移率输运路径位于界面PW中,其工作需要合适的栅场方向。这直接通过所公开的独特电容-电压特性来巩固。
The carrier transport properties in amorphous oxide semiconductor (AOS) heterojunction thin-film transistors (TFTs) are investigated by using dual gates to control the channel of bilayer AOSs. The mobility of such heterojunction channel exhibited distinct dependences on top-gate (TG) voltage (<inline-formula> <tex-math notation="LaTeX">$V_{\text {TG}}$ </tex-math></inline-formula>) and bottom-gate (BG) voltage (<inline-formula> <tex-math notation="LaTeX">$V_{\text {BG}}$ </tex-math></inline-formula>) The mobility was well maintained in TG mode, where <inline-formula> <tex-math notation="LaTeX">$V_{\text {TG}}$ </tex-math></inline-formula> was in line with the build-in electric field of the electron potential well (PW) formed at the heterojunction interface. In contrast, an increased <inline-formula> <tex-math notation="LaTeX">$V_{\text {BG}}$ </tex-math></inline-formula> gradually reduced the high mobility to the level of a single layer channel, since a high <inline-formula> <tex-math notation="LaTeX">$V_{\text {BG}}$ </tex-math></inline-formula> in the opposite direction of PW could eliminate the PW. This experimentally clarifies that the high-mobility transport path of AOS heterojunction channel locates in the interface PW and its operation demands a proper gate field direction. This were directly consolidated by the disclosed unique capacitance-voltage characteristics.
DOI: 10.1080/15980316.2020.1818641
发表时间: 2020-09-19
影响因子: 3.7
作者:
Ji, Dongseob;Jang, Jisu;Noh, Yong-Young
通讯作者: Noh, Yong-Young
DOI: 10.1002/sdtp.14615
发表时间: 2021-05
期刊: SID Symposium Digest of Technical Papers
影响因子: --
作者:
Jewel Kumer Saha;Arqum Ali;Mobaidul Islam;Ravindra Naik Bukke;Jin Jang
通讯作者: Jewel Kumer Saha;Arqum Ali;Mobaidul Islam;Ravindra Naik Bukke;Jin Jang
DOI: 10.1038/nature03090
发表时间: 2004-11-25
期刊: NATURE
影响因子: 64.8
作者:
Nomura, K;Ohta, H;Hosono, H
通讯作者: Hosono, H
DOI: 10.1080/15980316.2023.2219030
发表时间: 2023-06
影响因子: 3.7
作者:
Gwon Byeon;S. Jang;Tae-Moo Roh;Ji‐Min Park;Hyunsook Kim;Yong‐Young Noh
通讯作者: Gwon Byeon;S. Jang;Tae-Moo Roh;Ji‐Min Park;Hyunsook Kim;Yong‐Young Noh
使用超薄溶液加工 ZrOx 电介质的高性能全非晶双层金属氧化物薄膜晶体管
DOI: 10.1063/1.4895782
发表时间: 2014-09-15
影响因子: 4
作者:
Liu, G. X.;Liu, A.;Martins, R.
通讯作者: Martins, R.