Microwave Plasma Generation and Applications

这个研究项目是关于微波产生的热等离子体在一个 磁镜陷阱，以及这种等离子体作为X射线或 离子源 要研究的应用领域是X射线 固态电路制造中光刻和多电荷离子 离子束的生产。 等离子体是由 电子回旋共振加热 一个非- 麦克斯韦电子速度分布的回旋加热将是 通过实验和计算机模拟研究。 电子回旋 排放将被用作诊断。 平均能量和通量 来自等离子体的X射线辐射将被评估用于光刻 应用. 研究了等离子体的约束特性和行为， 最小B磁场将与其性能相关， 离子源。

This research program is on microwave production of a hot plasma in a magnetic-mirror trap, and the application of this plasma as an x-ray or ion source. The areas of application to be studied are x-ray lithography in solid-state circuit production and multiply-charged ion production for ion beams. The plasma is produced and heated by electron cyclotron resonance heating. The generation of a non- Maxwellian electron velocity distribution by cyclotron heating will be studied experimentally and by computer simulation. Electron cyclotron emission will be used as a diagnostic. The average energy and flux of x-ray radiation from the plasma will be evaluated for lithography applications. The confinement properties and behavior of the plasma in a minimum-B magnetic field will be correlated with its performance as an ion source.