Expedited Award for Novel Research: Clean Room Design for Improved Manufacturing

一项探索性研究将在微电子洁净室的气流动力学中进行，因为它与过程自动化设备相互作用，以确定这种方法是否最终可以改进洁净室设计，并具有高水平的污染控制。本研究将研究洁净室操作的流体动力学，包括考虑机器人作为污染源，以及机器人运动和工作站设计对洁净室中气溶胶分散的影响。计划开发一个机器人和末端执行器作为粒子发生器的模拟计算机程序，以及一个无尘室的模拟程序，该程序具有显示室内三维粒子浓度的图形输出。

An exploratory study will be conducted into the dynamics of air flow in the microelectronics clean room as it interacts with the process automation equipment to determine if this approach can eventually lead to improved clean room design with a high level of contamination control. This study will examine fluid dynamics of clean room operations, including the consideration of robots as a source of contamination and the effect of robot movement and work station design on the aerosol dispersion in the clean room. Development of a simulation computer program of robots and end effectors as particle generators is planned, as well as a simulation program of a clean room with graphic output showing three-dimensional particle concentration in the room.