Chemical Imaging with the Stigmatic Ion Microscope

这个项目是在一般地区的分析和表面 化学和二次离子质量子领域 光谱法（西姆斯）。 该研究计划将调查 影响二次西姆斯微量分析的因素 半导体和电子器件以及生物组织。 该计划的目标是（1）改善空间 像散二次离子显微镜的分辨率， 电荷耦合器件检测器的使用，以及（2）提供 元素和同位素高分辨率定量绘图 固体中的分布。 实现这些目标将 将西姆斯的应用扩展到许多新的重要材料 和生物医学问题。

This project is in the general area of analytical and surface chemistry and in the subfield of secondary ion mass spectrometry (SIMS). This research program will investigate the factors affecting practical SIMS microanalysis of semiconductor and electronic devices and of biological tissues. The goals of this program are (1) to improve the spatial resolution of the stigmatic secondary ion microscope through the use of a charge-coupled device detector and (2) to provide high-resolution quantitative mapping of elemental and isotopic distributions in solids. The achievement of these goals will broaden the application of SIMS to many new important materials and biomedical problems.