Fast Precision Robust Control of Resonant Flexible Systems

该项目旨在生产新的控制系统设计工具，以实现对包含柔性结构的先进工程系统的快速精确控制。这将提高原子力显微镜等精密仪器的控制系统的速度和精度，并提高半导体制造、机器人和微型机电系统等精密工程领域的控制系统性能。预计其成果将是新的控制系统综合和建模工具，能够使用非线性和切换元件对工业系统进行快速和高精度控制，并实现高水平的稳健性。这将使澳大利亚的精密制造业受益。

The project aims to produce new control system design tools to enable fast precision control of advanced engineering systems encorporating flexible structures. This should enable improved speed and accuracy in control systems for precision instruments such as atomic force microscopes along with improving control system performance in areas of precision engineering such as semiconductor manufacturing, robotics and microelectromechanical systems. The outcomes are expected to be new control system synthesis and modelling tools enabling fast and highly accurate control of industrial systems using nonlinear and switching elements and achieving high levels of robustness. This will benefit Australian precision manufacturing industries.