NSF Self-Sufficient Partnership for Research with Universityof Arizona Center for Microcontamination Control

亚利桑那大学I/UCR中心 微污染控制主要研究 微电子工业的微污染问题， 在推动美国经济增长方面发挥关键作用的行业。 在世界上的竞争力。 该中心已运作了 六年半，完全符合I/UCRC指南。 该中心一直活跃在一些研究领域，包括： (1)本文研究了液体中粒子的动电行为， 蚀刻浴，（2）真空系统中的颗粒检测和形成， (3)静电放电的检测与控制 生产情况，（4）检测和评价 粒子使用电磁散射，和（5）建模 洁净室气溶胶动力学 中心的质量也 被别人认可。 该中心的专业知识是 在SEMATECH中心在该领域的奖项， 污染和缺陷控制亚利桑那大学。 该中心补充了I/UCRC的活动。 项目经理建议亚利桑那大学 微污染控制I/UCRC每年获得30，000美元 三年自给自足的工业/大学 合作研究中心伙伴关系。

The University of Arizona's I/UCR Center for Microcontamination Control which primarily studies microcontamination problems for the microelectronics industry, an industry with a key role to play in the drive for U.S. competitiveness in the world. The Center has been in operation for six and one half years, in fully compliance with I/UCRC guidelines. The Center has been active in a number of research areas including: (1) The electrokinetic behavior of particles in liquids used in etch baths, (2) Particle detection and formation in vacuum systems, (3) The detection and control of electrostatic discharge in production situations, (4) The detection and evaluation of particles using electromagnetics scattering, and (5) The modeling of Cleanroom Aerosol Dynamics. The quality of the Center has also been recognized by others. The expertise in the Center was instrumental in the award of a SEMATECH Center in the area of Contamination and Defect Control to the University of Arizona. This Center complements the activities of the I/UCRC. The Program Manager recommends that the University of Arizona I/UCRC for Microcontamination Control be awarded $30,000 per year for three years for a Self-Sufficient Industry/University Cooperative Research Center Partnership.