Undergraduate Microelectronics Processing Laboratory

该项目致力于开发一套微电子加工的本科实验室课程。这些课程通过为学生提供实践经验来补充微电子课程的广泛集合。第一节课程集中于实验，教授光致抗蚀剂、蚀刻和氧化等器件制造步骤。第二季度的课程将对制造的科学细节进行更深入的研究。鉴于微电子学的进步历来是强有力的跨学科活动的结果，本课程将面向物理、化学、化学工程、电气工程和材料工程的学生。这个项目意义重大，因为它将通过动手实验室实验向处于学术生活早期的本科生介绍微电子设备制造工艺。

This project focuses on the development of a set of undergraduate laboratory courses in microelectronics processing. These courses complement the extensive collection of lecture classes in microelectronics by providing hands-on experience for the students. The first quarter course concentrates on experiments to teach the steps of device fabrication such as photoresist, etching and oxidation. The second quarter course allows deeper investigation of the scientific details of fabrication. Given that progress in microelectronics has historically been a result of strong interdisciplinary activity, the course will be offered to students in physics, chemistry, chemical engineering, electrical engineering, and materials engineering. This project is significant because it will introduce the microelectronic device fabrication process to undergraduates early in their academic life through hands-on laboratory experimentation.