MRI: Epitaxial Growth of Diamond Films for CharacterizationUsing Scanning Tunneling Microscopy

9311724利用超高真空扫描隧道显微镜和拉曼光谱对化学气相沉积(CVD)外延生长金刚石薄膜进行了PEREZ基础研究，以确定生长的薄膜质量。计划在原子分辨率下详细研究在天然金刚石衬底上外延金刚石薄膜的生长，以及氢在生长中所起的作用。其他衬底上的多晶膜也将被研究。总体目标包括研究金刚石薄膜的成核和生长，以及氢在这些过程中所起的作用。由于金刚石独特的化学和物理性质，金刚石薄膜具有大量潜在的应用前景。金刚石薄膜的潜在应用包括保护涂层、散热片、光学窗口和能够在高温下工作的晶体管，例如，在汽车或飞机发动机的内部工作温度下。这项研究将有助于我们从根本上了解金刚石薄膜在低温和高压下的形成过程，从而有助于开发这种独特材料的实际应用。***

9311724 Perez Fundamental studies of epitaxial growth of diamond films by chemical vapor deposition (CVD) will be conducted using scanning tunneling microscopy (STM) in ultrahigh vacuum (UHV), and Raman spectroscopy to determine the quality of the grown films. It is planned to study, at atomic resolution detail, the growth of epitaxial diamond films on natural diamond substrates, and the role that hydrogen plays in growth. Polycrystalline films on other substrates will also be studied. The overall objectives include the study of both the nucleation and growth of diamond films, and the role that hydrogen plays in these processes. %%% Diamond films have a large number of potential applications due to the unique chemical and physical properties of diamond. Potential applications for diamond films include protective coatings, heat sinks, optical windows, and transistors capable of operation at high temperature, for example, at the internal operating temperatures of automobile or airplane engines. This research is expected to contribute significantly to our fundamental understanding of the formation of diamond films at low temperature and pressure, and thereby to aid in the development of practical applications of this unique material. ***