A Non-Vacuum Field Emission Device

在该建议中，描述了一种高速场致发射MEMS器件，其不需要高真空进行操作。这通过用最近发明的非常低功函数的金刚石时间膜涂覆微尖端阴极来实现，使得从阴极提取电子的电场小于5伏/微米。 因此，仅需要在阴极和栅极之间施加5伏的电压以提取电子，使得该装置与标准半导体电子器件兼容。 同时，低电压电子在空气中具有比阴极-阳极间隔更长的平均自由程，从而这种装置的非真空操作是可能的。 在第一阶段中，我们建议通过设计、计算机建模和制造二极管和二极管型场发射器件来证明这种高速器件的可行性。 ***

9361273 Kumar In this proposal, a high speed field emission triode device is described which does not require high vacumm for operation. This is enabled by coating a micro-tip cathode with recently invented very low work function diamond time film, such that the electric field to extract electrons from the cathode is less than 5 volts per micrometer. Hence a voltage of only 5 volts need be applied between the cathode and the grid to extract electrons making this device compatible with standard semiconductor electronics. At the same time, low voltage electrons have mean free paths in air which are longer than the cathode-anode separation, thereby a non-vacuum operation of such a device may be possible. In phase I, we propose to demonstrate the feasibility of such a high speed device by designing, computer modeling and fabrication diode and triode type field emitter devices. ***