Optical Probes for Solution-Based Processing of Inorganic Thin Films

摘要：本研究关注无机材料溶液基加工的光学诊断技术的发展。该研究计划的总体目标是开发和创造用于无机固体溶液处理的光学探针和光谱方法。本文将重点介绍溶胶-凝胶前驱体无机薄膜的浸涂，以仔细评估光学探针方法的有效性和灵敏度。此外，研究将扩展到包括各种组合物，另一种基于溶液的薄膜沉积方法（旋转涂层）和不同的薄膜结构（多层）。这项研究的成果将是用于材料溶液处理的光学探针的科学和光谱学。所提出的技术提供了使用光信号实时表征处理参数的机会。这些技术与计算机控制的材料加工“智能制造”兼容。%%%%该研究项目有两个互补的目标。第一个目标是开发光学探针和光谱方法来表征最重要的加工参数，包括薄膜粘度，干燥，应力产生和均匀性。第二个目标是利用探针来表征在薄膜演化过程中发生的相关化学和结构变化。不同探针对膜取向效应、溶剂成分变化、毛细管压力和网络崩溃等特征都很敏感。这项研究的成果将是用于材料溶液处理的光学探针的科学和光谱学。本提案中讨论的技术提供了使用光信号实时表征处理参数的机会。这些技术与计算机控制的材料加工“智能制造”兼容。

Abstract 9408780 Dunn This research is concerned with the development of optical diagnostic techniques for solution-based processing of inorganic materials. The overall objective of the research program is to develop and create optical probes and spectroscopic methods for solution-based processing of inorganic solids. The dip coating of inorganic films from sol-gel precursors will be emphasized to carefully evaluate the optical probe methods in terms of their effectiveness and sensitivity. In addition, the studies will be extended to include a variety of compositions, another solution-based film deposition method (spin coating) and a different film configuration (multilayers). The outcome of the research will be the science and spectroscopy of optical probes for solution-based processing of materials. The proposed techniques offer the opportunity to use optical signals to characterize processing parameters in real-time. The techniques are compatible with computer-controlled, "intelligent manufacturing" for materials processing. %%%% The research program has two complementary goals. The first goal is to develop optical probes and spectroscopic methods to characterize the most important ppocessing parameters which will include film viscosity, drying, stress generation and uniformity. The second objective is to utilize the probes to characterize the related chemical and structural changes which occur during film evolution. The different probes will be sensitive to such features as film orientation effects, solvent composition changes, capillary pressure and network collapse. The outcome of the research will be the science and spectroscopy of optical probes for solution-based processing of materials. The techniques discussed in this proposal offer the opportunity to use optical signals to characterize processing parameters in real-time. The techniques are compatible with computer-controlled, "intelligent manufacturing" for materials processing.