Preparation and Characterization of Single Domain Epitaxial Electro-Optic Films

9409964 Yan外延式电光薄膜的制备是制造新型集成电光光电器件的基础。为了使薄膜具有良好的电光性能，薄膜必须是单畴结构，而这在生长过程中是不可能自动实现的。本课题是研究单晶单畴结构外延电光薄膜的制备方法。采用射频磁控溅射和激光烧蚀法制备多层结构的LiTaO3和LiNbO3薄膜。沉积过程结束后，外倾的LiTaO3和LiNbO3薄膜将被电场极化。测量了极化外延LiTaO3和LiNbO3薄膜波导的电光系数，并研究了其与极化条件的关系。目的是成功制备具有良好电光性能的单畴外延LiTaO3和LiNbO3薄膜波导，并了解其基本工艺。＊＊＊

9409964 Yan Preparation of expitaxial electro-optic thin films is the base for fabricating new integrated electro-optic and optoelectronic devices. To have good electro-optic performance, the films should be in a single domain structure, which can not be achieved automatically in the growth processes. This project is to study ways to prepare epitaxial electro-optic thin films with single crystal and single domain structure. LiTaO3 and LiNbO3 films with multilayer structure will be deposited by RF magnetron sputtering and laser ablation. The expitaxial LiTaO3 and LiNbO3 films will be poled by an electric field after the deposition process. The electro-optic coefficients of the poled epitaxial LiTaO3 and LiNbO3 film waveguides will be measured and the correlation with the poling conditions will be studied. The objectives are to successfully prepare single domain epitaxial LiTaO3 and LiNbO3 film waveguides with good electro-optic property and to understand the basic process. ***