Energy Filtered Detector for Micro-Diffracton in the Scanning Electron Microscope

*9411850 Mancuso SBIR第二阶段资金被提供给高级显微镜技术公司的研究人员，以开发具有良好图案分辨率和大接受角度的电子背向散射图案能量过滤器。第二阶段的研究目标是：1)开发一种能量滤光器和EBSP传感器元件，由于能量滤波而保持了高质量的微衍射图案，并改善了合同；2)保持了微衍射图案的大接受角度。如果能够做出这些改进，就有可能取得两大进展。首先，无论是直接观察还是数字采集和分析，衍射图的可见度都会提高。这将使EBSP(以及随后的扫描电子显微镜)扩展到更多种类的应用和材料。其次，新设备可以作为EBXP探测器和小角度(暗场)探测器的双重用途。因此，材料研究人员既可以对衍射图进行定量分析，也可以对其进行定性的衍射成像。这项研究的成功将导致第三阶段计划，开发一个可用于基础研究、材料设计和制造支持的系统。这项技术既适用于新的电子显微镜，也适用于现有的大量扫描电子显微镜--允许在材料表征中充分利用扫描电子显微镜技术。***

*** 9411850 MANCUSO SBIR Phase-II funds are provided to investigators at Advanced Microscopy Techniques to develop an energy filter for electron backscatting patterns (EBSP) with fine pattern resolution and a large acceptance angel. The Phase-II research objectives are: 1) to develop an energy filter and EBSP sensor element that retains high quality micro-diffraction patterns with improved contract due to energy filtering, and 2) maintain a large acceptance angel for the microdiffraction patterns. If these improvements can be made, two major advances would be possible. First, the visibility of the diffraction pattern would improve for both direct viewing and for digital acquisition and analysis. This would extend EBSP ( and consequently SEM) to a greater variety of applications and materials. Second, the new device could serve a dual purpose as both an EBXP detector and a small angle (dark field) detector. Thus, both quantitative analysis of diffraction patterns and qualitative diffraction imaging are available to the materials researcher. The success of this research will lead to a Phase-III program to develop a system that can be used in basic research, materials design and manufacturing support. The technique can be adapted to both new electron microscopes and the large existing base of SEMs - allowing the fullest use of SEM technology in materials characterization. ***