CAREER: Fabrication of Two- and Three-Dimensional Photonic Crystals

9501820梅耶尔这个项目的主要目标是刺激和激励各级学习（本科生，研究生，研究生）。 在基础研究方面，作者提出发展一种制造用于光波长的二维和三维光子晶体的方法。 将被制造的3-D周期性电介质结构是简单立方晶格中的方形杆结构。 这种支架结构具有所有平面彼此成直角的特性。 直观地说，这意味着这种方棒结构的制造过程将比面心立方晶格的制造过程容易得多。 所提出的工艺依赖于目前用于制造III-V光电器件的许多技术的集成。 特别是，3-D结构将由分子束外延（MBE）生长的GaAs/A1 As叠层制成。 生长之后，使用电子束光刻法在样品表面上限定亚微米交叉阴影图案。 使用反应离子束蚀刻（里贝）去除GaAs/Al As叠层的未保护区域。 为了完成光子晶体，修改AlAs载体的组成结构，并在选择性蚀刻剂中去除AlAs的交替层。 在这个3D结果的过程中，还将制造2D结构。 这两种光子晶体都将通过透射法来表征。 在光学波长上成功演示三维光子晶体将允许开发一类新的设备，可用于反射，捕获，引导和开关光。 ***

9501820 Mayer The primary objective of this project is to stimulate and motivate learning at every level (undergraduate, graduate, post-graduate). In the area of fundamental research, the author proposes to develop a process to fabricate 2- and 3- dimensional (2- and 3-D) photonic crystals for optical wavelengths. The 3-D periodic dielectric structure that will be fabricated is a square-rod structure in the simple-cubic lattice. This scaffold structure has the property that all of the flat faces are at right angles to one another. Intuitively, this implies that the fabrication procedure for this square-rod structure will be much easier than those described for face-centered-cubic lattices. The proposed process relies on the integration of many techniques that are currently being used to fabricate III-V optoelectronic devices. In particular, the 3-D structure will be fabricated from a GaAs/A1As stack grown by molecular beam epitaxy (MBE). Following the growth, a submicron cross-hatched pattern is defined on the sample of the surface using electron-beam lithography. The unprotected areas of the GaAs/A1As stack are removed using reactive ion beam etching (RIBE). To complete the photonic crystal, the compositional structure of the A1As supports is modified and the alternating layers of A1As are removed in a selective etchant. En route to this 3-D result, a 2-D structure will also be fabricated. Both of these photonic crystals will be characterized by the transmission method. The successful demonstration of a 3-D photonic crystal at optical wavelengths would allow the development of a new class of devices that could be used to reflect, trap, guide, and switch light. ***