Industry/University Cooperative Research Center for Sensor and Actuators - PZT Dielectrics for MEMS Applications

该奖项旨在建立宾夕法尼亚州立大学电介质研究中心/大学合作研究中心与加州大学伯克利分校传感器和执行器工业/大学合作研究中心在微电子机械设备锆钛酸铅电介质领域的合作/合作研究项目。加州大学的该中心正在研究表面微机械设备以及微系统和组件的设计。宾夕法尼亚州立大学的这个中心正在研究薄膜介电、压电和铁电材料的物理学。在这个项目中，各机构正在分享专业知识和设施，目的是通过在微机电设备中实施高活性压电薄膜来提高压电激活微设备的性能。

EEC-9527545 Muller This award is to establish a cooperative/collaborative research program between The Pennsylvania State University Center for Dielectric Studies Industry/University Cooperative Research Center and the University of California at Berkeley Sensor and Actuator Industry/University Cooperative Research Center in the area of lead zirconate titanate dielectrics for microelectromechanical devices. The center at the University of California is working on surface micromachined devices and the design of microsystems and components. The center at The Pennsylvania State University is working on the physics of thin-film dielectric, piezoelectric and ferroelectric materials. In this program the institutions are sharing expertise and facilities with the goal of improving the performance of piezoelectrically-activated microdevices through the implementation of highly active piezoelectric films in microelectromechanical devices.