Atomic Force Microscopy of Films Deposited on Solid and Chemically Modified Substrates

这个启动补助金奖给西方学院将支持研究 Eileen M教授西班牙 研究的主题是研究 脉冲激光沉积过渡金属硫属化物薄膜 蒸发，这可以产生高动能物质。 到 了解高动力学薄膜生长和成核的问题 能源物种，两个现代实验技术。 膜 通过原子力显微镜测量形貌， 确定产生结晶膜的参数。 与 单光子电离飞行时间质谱，鉴别， 动能分布和等离子体的相对浓度 测量影响沉积膜性质的物质。 这项研究将促进对材料的基本理解 薄膜生长的根本问题。 这些电影是基础， 制造由各种金属组成的亚微米电子器件， 含金属层，一种在工业中引起强烈兴趣的技术， 微电子工业。

This starter grant award to Occidental College will support the research of Professor Eileen M. Spain. The theme of the research is the study of transition metal chalcogenide thin films deposited by pulsed laser vaporization, which can produce high kinetic energy species. To understand the issues of film growth and nucleation with high kinetic energy species, two modern experimental techniques are employed. Film topography is measured by atomic force microscopy and the experimental parameters that produce crystalline films are determined. With single-photon ionization time-of-flight mass spectrometry, the identity, kinetic energy distribution, and relative concentration of the plasma species that affect the deposited film properties are measured. This research will advance the fundamental understanding of materials issues underlying the growth of thin films. Such films are the basis for fabrication of submicron electronic devices composed of various metal and metal-containing layers, a technology of intense interest in the microelectronics industry.