Presidential Faculty Fellows Awards

9553153 Ozturk很明显，电子工业的未来将基于通常被称为纳米电子学的半导体制造的新水平，这意味着尺寸的至少十倍缩放对于增加每个芯片的器件数量以及提供更快、更节能的芯片是必不可少的。 此外，人们广泛接受的是，未来的半导体制造将基于单晶片处理，而不是目前的批量制造。 这种转变是由成本效益的需求，以及满足实时晶圆诊断纳入纳米器件和电路的制造中必不可少的需求驱动的。作为该奖项的结果，将开展的研究和教育活动集中在最先进的和先进的器件工艺和工具，使纳米级集成电路的制造使用单晶片加工模型。 新的工艺和设备将被研究用于未来的工厂，包括原子级工程和选择性加工。 工程教育的新方法将包括与工业界的互动。

9553153 Ozturk It has become clear that the future of the electronics industry will be based upon a new level of semiconductor manufacturing commonly referred to as nanoelectronics, which implies at least a factor of ten scaling in dimensions is essential to increase the number of devices per chip, and to provide faster, more power efficient chips. In addition, it is widely accepted that future semiconductor manufacturing will be based upon single wafer processing, as opposed to present day batch manufacturing. This transition is driven by demands for cost-effectiveness, as well as meeting needs for real-time wafer diagnostic incorporation essential in the manufacture of nanoscale devices and circuits. The research and education activities to be undertaken as a result of this award are focused upon state-of-the-art and advanced device processes and tools enabling the manufacture of nanoscale integrated circuits using single wafer processing models. New processes and devices will be investigated for use in future factories, including atomic level engineering and selective processing. New approaches to engineering education will include interaction with industry.