Development of a Compact, Broad Range Magnetic Spectrometer for Ion Beam Analysis

9625960兰福德该奖项是为了开发一种紧凑、大范围的磁光谱仪，用于材料研究的离子束分析。该光谱仪设计用于卢瑟福背向散射(RBS)的探测器，它将允许以与当前系统同样容易和精确的方式测量RBS光谱，但具有十倍以上的更高的能量分辨率。能量分辨率的这种数量级的提高转化为RBS近表面深度和质量分辨率的数量级的改善。有了这台能谱仪，4HeRBS对所有靶核的质量分辨率都将优于(即小于)1Amu，并且近表面深度分辨率将接近原子尺寸。这种光谱仪的一个新特点是能够测量以180度为中心的大立体角的RBS光谱，其中运动展宽对于所有目标质量都是最小的(de/d=0)。扩展的焦平面允许同时测量He+和He++离子的相对强度，以便校正电荷分数效应。虽然这种光谱仪的设计主要考虑了RBS的需求，但它也可以用作核反应分析(NRA)和能量反冲检测(ERD)的探测器，在这些分析方法中，高能量分辨率将再次转化为可实现的深度分辨率的显著提高。%此仪器很可能提供显著改进的材料分析能力，并将为学生提供培训。他将为工艺开发和器件制造提供重要的反馈。***

9625960 Lanford This award is to develop a compact, broad range magnetic spectrometer to be used in ion beam analysis for materials research. This spectrometer is designed to be used as a detector for Rutherford backscattering (RBS) wihich will allow the measurement of RBS spectra with equal ease and precision as current systems, but with more than a factor of ten better energy resolution. This order of magnitude improvement in energy resolution translates into an order of magnitude improvement in the near surface depth and mass resolution of RBS. With this spectrometer, 4HeRBS will have mass resolution better than (i.e. smaller than) 1 amu for all target nuclei and will have a near surface depth resolution approaching atomic dimensions. One novel feature of this spectrometer is the ability to measure RBS spectra with a large solid angle centered at 180o where kinematic broadening is minimized (dE/d=0) for all target masses. An extended focal plane allows the simultaneous measurement of relative intensity of He+ and He++ ions in order to correct for charge fraction effects. Although designed with the needs of RBS as a primary concern, this spectrometer can also be sued as a detector in nuclear reaction analysis (NRA) and energy recoil detection (ERD), where the high energy resolution will again translate into dramatic improvement in the depth resolution attainable by these analytic methods. %%% This instrument is likely to provide substantially improved capability for materials analysis, and will provide training to students. He will provide important feedback for processing development and device fabrication. ***