SBIR Phase I: Compact, Stable Extreme-Ultraviolet (EUV) Light Source With Lisitano Coil Excitation

该小型企业创新研究一期项目将研究高效极紫外（EUV）源的开发，用于紫外光谱仪和探测器的绝对强度和波长校准、空间环境模拟、加速环境测试和EUV表面处理。现有的紫外线光源，电子回旋共振（ECR）等离子体加热，已经证明了波长低至30纳米的发射。第一阶段的目标是在更短的波长下产生强大的EUV辐射。ecr加热的等离子体，在最大限度地提高微波耦合的“Lisitano线圈”驱动下，应该产生具有强光谱特征的多电荷离子，低至5-10 nm。在第一阶段，Spire将测试一个原型Lisitano线圈的微波耦合效率；在改进的磁场配置下操作现有的UV光源，以获得压力更低、温度更高的ecr加热等离子体，并增强EUV发射；测量EUV输出；并设计一种新的Lisitano线圈激励光源，该光源将在第二阶段建造、测试和校准。极紫外光源将比双等离子体和电弧具有更高的强度、可靠性和可重复性，并且比同步辐射源具有更低的成本。除了紫外仪器校准外，它还将对医疗和其他产品的加速环境测试和表面处理有价值。＊＊＊

*** ABSTRACT 9661120 Halverson This Small Business Innovation Research Phase I project will investigate the development of a highly efficient extreme-ultraviolet (EUV) source for absolute intensity and wavelength calibration of UV spectrometers and detectors, space environment simulation, accelerated environmental testing, and EUV surface treatments. An existing UV light source, with electron cyclotron resonance (ECR) plasma heating, has already demonstrated emission at wavelengths down to 30 nm. The goal of this Phase I effort is to generate powerful EUV radiation at even shorter wavelengths. The ECR-heated plasma, when driven by a "Lisitano coil" that maximizes microwave coupling, should produce multiply-charged ions with strong spectral features down to 5-10 nm. During Phase I, Spire will test a prototype Lisitano coil for microwave coupling efficiency; operate the existing UV light source in a modified magnetic field configuration to attain lower pressure, higher temperature ECR-heated plasmas with enhanced EUV emission; measure EUV output; and design a new light source with Lisitano coil excitation that will be built, tested, and calibrated in Phase II. The EUV light source will have much higher intensity, reliability, and reproducibility than duoplasmatrons and arcs and much lower cost than synchrotron radiation sources. In addition to UV instrument calibration, it will be valuable for accelerated environmental testing and surface treatment of medical and other products. ***