CAREER: Molecular Interfacial Engineering for Advanced Applications

CTS-9703207这个职业项目是对与使用高分辨率光刻工艺（电子束书写、极紫外光刻和x射线光刻）制造横向尺寸小于100nm的结构相关的各种材料问题的研究。一个问题是确定聚合物（光刻胶）薄膜的物理性质，以及溶剂和其他低分子量试剂在这些薄膜中的扩散行为，以便对当前的光刻胶加工及其局限性有更基本的了解；另一个问题是开发用于极紫外和x射线光刻的新聚合物。一些工作的目标是微纳米制造的新策略，例如，使用有图案的自组装单层和/或多层抗蚀剂系统。将研究一种新的制造工艺，以实现不同材料的有效集成。这个过程依赖于两个层次的自组装。在分子尺度上，功能化自组装单层（SAMS）控制表面的润湿和粘附相互作用。在芯片、模块或面板的尺度上，流体自组装（通过SAMS覆盖的表面之间预定的相互作用增强）将一种材料（例如Si）的微米级结构提供给另一种材料（例如塑料）的基底上多达1000万个受体位点。使用原子力显微镜（AFM）对经过SAMs修饰的表面的相互作用和摩擦特性进行基础研究，其中20 (m)玻璃球附着在AFM尖端。这些中尺度研究将指导宏观过程的发展，并将对摩擦学领域做出重大贡献。在有限的供应中使用非菲克扩散增塑剂将被研究作为控制玻璃状聚合物的形态和材料特性的策略，特别是用于光学应用。研究人员将制作并测试由折射率梯度定义的透射截面面积，折射率梯度对应于增塑剂浓度的梯度。他们还将在玻璃聚合物薄膜中使用图案SAMS、优先润湿和非菲克扩散来制造平面衍射光栅和平面透镜。除了光学应用外，本研究还将对我们了解玻璃聚合物中的非菲克扩散机制做出重大贡献。通过34万美元的国家拨款，威斯康星大学化学工程系的聚合物实验室最近用最先进的设备进行了翻新。这是一个独特的机会，可以开发一门强调聚合物合成和表征的聚合物实验室课程。该实验将以两种形式教授给大四学生和一年级研究生：1)每周实验和实验报告，以及2)与基于问题学习的教学方法相一致的学期小组项目。这门实验课程是对高分子科学与技术课程的补充。在研究生阶段，将开设一门新的高分子物理化学课程。这些课程的改进与我们的教育和研究计划协同作用，在本科阶段提供研究活动，准备和指导研究生在聚合物领域进行创新研究，并团结校园内的聚合物社区。研究人员还将在夏季开设一门短期课程，主要面向科学家

ABSTRACT CTS-9703207 This Career project is an investigation of a variety of material issues associated with the use of high resolution lithographic processes (electron beam writing, extreme UV lithography, and X-ray lithography) to fabricate structures with lateral dimensions less than 100nm. One issues is the determination of the physical properties of thin films of polymers (photoresist), and the diffusion behavior of solvents and other low molecular weight agents in these films in order to develop a more fundamental understanding of current photoresist processing and its limitations_ Another is the development of new polymers for use in extreme UV and x-ray lithography. Some of the work targets new strategies for micro- and nanofabrication that will involve, for example, the use of patterned self-assembled monolayers and/or multiple layer resist systems. A new manufacturing process will be investigated for the efficient integration of dissimilar materials. The process relies on two levels of self-assembly. At the molecular scale, functionalized self-assembled monolayers (SAMS) control wetting and adhesion interactions of surfaces, At the scale of chips, modules, or panels, fluidic self-assembly (enhanced by predetermined interactions between surfaces covered with SAMS) delivers structures of micron dimensions of one material (Si, for example) to as many as 10 million receptor sites on a substrate of another material (plastic, for example). Fundamental studies of the interactions and frictional properties of surfaces modified with SAMs will be made using a modified atomic force microscope (AFM) in which 20 (m glass spheres are attached to the AFM tip. These mesoscale studies will guide the macroscopic process development and will make significant contributions to the field of tribology. The use of non-Fickian diffusion of plasticizers in limited supply will be investigated as a strategy to control the morphology and materials properties of glassy polymers, specifically for opt ical applications. The investigators will fabricate and test the cross-sectional area of transmission is defined by refractive index gradients that correspond to gradients in plasticizer concentration. They will also films fabricate flat diffraction gratings and flat lenses in glassy polymer films using patterned SAMS, preferential wetting, and non-Fickian diffusion. In addition to the optical applications, the proposed research will make significant contributions to our knowledge of non-Fickian diffusion mechanisms in glassy polymers. Through a State Grant of $340,000, the polymer laboratory in the Department of Chemical Engineering at the University of Wisconsin has recently been renovated with state-of-the-art equipment A unique opportunity exists to develop a polymer laboratory course that emphasizes polymer synthesis and characterization. The lab will be taught to seniors and first year graduate students in two formats: 1) weekly labs and lab reports, and 2) semester long group projects that are consistent with the teaching methodology of problem based learning. This laboratory course will compliment a lecture course in polymer science and technology. At the graduate level, a new course in the physical chemistry of polymers will be introduced. These curriculum improvements are synergistic with our educational and research initiatives to offer research activities at the undergraduate level, to prepare and mentor graduate students to perform innovative research in the field of polymers, and to unite the polymer community on campus. The investigator will also develop a short course to be offered during the summer primarily for scientists