SBIR Phase I: The Infinite Velocity Method for Elemental Quantification by Time-of-Flight Secondary Ion Mass Spectrometry (SIMS)

* 9760853弗莱明 这个小企业创新研究第一阶段项目提出将无限速度方法用于定量元素的飞行时间二次离子质谱（TOF-SIMS），并评估半导体测试的概念。提高半导体性能和效率的一个关键要求将是更好的分析程序，用于量化更小特征和更薄层中的元素。无限速度法源于这样的观察，即如果离子产率首先针对溅射产率和仪器传输进行校正，则对于无限速度（高离子能量）下的所有元素，每单位样品浓度的二次离子产率趋于单一值。 在第1阶段，将证明这一概念的有效性。 半导体薄膜和小特征的定量元素分析作为商业分析服务和仪器升级而销售。 这个小公司的估计收入为每年2，000，000美元，如果可以在预期的检测限下进行定量，则收入可能更高。 ***

*** 9760853 Fleming This Small Business Innovation Research Phase I project proposes to apply the infinite velocity method for quantification of elements to time-of-flight secondary ion mass spectrometry (TOF-SIMS) and to evaluate the concept for semiconductor testing. A key requirement to improve semiconductor performance and efficiency will be better analysis procedures for quantification of elements in smaller features and thinner layers. The infinite velocity method stems from the observation that secondary ion yields per unit of sample concentration tend to a single value for all elements at infinite velocity (high ion energy) if the ion yields are first corrected for sputter yield and instrument transmission. In Phase 1, the efficacy of this concept will be demonstrated. Quantitative elemental analysis of thin films and small features in semiconductors are marketed as commercial analytical services and instrument upgrades. Estimated revenues for this small firm are $2,000,000 per year, or larger if quantification can be performed at the expected detection limits. ***