Microsystems Instrumentation: A Miniature Fourier Transform Spectrometer

9802260柯林斯 本建议的目标是利用新开发的微加工技术，实现一个微型傅里叶变换光谱仪（FTS）的光谱分辨率大于0.1厘米-1。 傅里叶变换光具座的投影尺寸，包括光源、反射镜、单元和检测器，预计为14 cm x 8 cm x 8 cm（5”x 3”x 3”），估计重量小于2 kg。 微型FTIR仪器能够作为常规化学分析仪器操作，或者由于其小尺寸和低成本，可以用作自动化环境传感器来监测几乎任何预编程的收集化学特征。 更重要的是，微型FTS为最终实现全新的仪器和化学分析概念提供了基本的技术基础。 随着分析仪器的小型化，将多个分析仪器组合成容纳在单个紧凑仪器内的完整化学实验室的系统集成方法变得可行。 微型FTS的制造和表征是实现这一目标的第一步。 ***

9802260 Collins The goal of this proposal is to utilize newly developed microfabrication techniques to realize a miniature Fourier transform spectrometer (FTS) with spectral resolutions greater than 0.1 cm-1. The projected dimensions of the Fourier transform optical bench, complete with optical source, mirrors, cells, and detector, is expected to be 14 cm x 8 cm x 8 cm (5" x 3" x 3") with an estimated weight of less than 2 kg. The miniature FTIR instrument is capable of operating as a routine chemical analysis instrument, or because of its small size and low cost can be used as an automated environmental sensor to monitor virtually any pre-programmed collection chemical signatures. More importantly, the miniature FTS provides a fundamental technology base for the eventual realization of radically new instrumentation and chemical analysis concepts. With miniaturization of analytical instruments, a systems integration approach which combines multiple analytical instruments into a complete chemical laboratory housed within a single compact instrument becomes feasible. The fabrication and characterization of the miniature FTS is the first step towards realization of that goal. ***