Numerical and Experimental Investigation of Laser Micromachining Processes for Improved Precision and Prediction Capabilities

烧蚀激光微加工过程的各个方面之间的耦合关系将被建模，数值研究和实验验证。 将开发一个瞬态三维模型，包括固体材料中的传热和相变、与努森层相关的蒸发和气体动力学以及等离子体效应的耦合方程。 基于控制体积的有限差分算法与幂律方案将用于固体/液体和等离子体区域，而积分方法将用于解决在克努森层的跳跃条件。 该模型将预测加工几何形状，能量传输，反冲动量，等离子体流，粒子喷射和碎片形成。研究将带来更精确的知识和更高的预测能力。 这将有助于满足激光微加工中空间和时间尺度更小的趋势所产生的需求。 该项目还将为该领域其他制度的定量预测能力的未来发展提供宝贵的见解。

DMI-9813453Yao The coupled relationships among various aspects of ablative laser micromachining processes will be modeled, numerically explored, and experimentally validated. A transient three-dimensional model embracing coupled equations for heat transfer and phase change in solid material, evaporation and gas dynamics associated with a Knudsen layer, and effects of plasma will be developed. A control-volume based finite-difference algorithm with power-law scheme will be used for the solid/liquid and plasma regions while an integral method will be used to solve for jump conditions in the Knudsen layer. The model will predict machined geometry, energy transport, recoil momentum, plasma flow, particle ejection, and debris formation. More precise knowledge and improved prediction capabilities will result from the research. This will help meet the need arisen from the trend towards smaller spatial and temporal scales in laser micromachining. The project will also provide valuable insights into future development of quantitative prediction capabilities in other regimes of the field.