An Integrated Circuit Fabrication and Characterization Laboratory

提出了一个半导体器件处理和表征的实验室课程，这将形成一个新的应用物理课程的关键要素正在开发的物理系在俄勒冈州大学。资金要求从NSF-ILI计划，以发展这个实验室。新课程的目标是更好地为物理专业和化学等相关领域的专业做好准备，以便建设性地参与工业实习计划，并最终在半导体制造业中从事富有成效的职业。实验室课程是新课程的重要组成部分，将使物理和化学专业的学生接触到传统上不包括在本科物理或化学课程领域的技术重要问题。

A laboratory course in semiconductor device processing and characterization is proposed which will form a key element of a new curriculum in Applied Physics being developed by the Physics Department at the University of Oregon. Funds are requested from the NSF-ILI program in order to develop this laboratory. The goal of the new curriculum is to better prepare physics majors and majors in allied fields such as chemistry for constructive participation in an industrial internship program, and ultimately for productive careers in the semiconductor manufacturing industry. The laboratory course constitutes an essential component of the new program and will expose physics and chemistry majors to technologically important issues in an area not traditionally covered in undergraduate physics or chemistry curricula.