SBIR Phase I: Study of Macroparticle Growth and Its Effect on Relatively Thick Functional Physical Vapor Deposition (PVD) Coatings

这个小企业创新研究（SBIR）第一期项目提出了一种新的物理气相沉积（PVD）替代传统电镀，用于沉积相对较厚的功能金属涂层。众所周知，电镀作业会产生大量有害废物和有毒烟雾。PVD方法将避免使用液体化学品，就地回收固体金属，并且不会产生排放。这个概念是以高速率的非现场金属沉积，这将允许在三维物体上同时从四面八方生长相对较厚（大于10微米）和均匀的金属沉积。这样，就有可能在相对较短的时间内存放大量的小物件或少量的大物件。第一阶段将探讨工艺参数对生长膜中夹杂物降解和厚膜完整性的影响。过程建模，使用实验的统计设计，将进行。铬、铜、镍和其他相对较厚的涂层广泛用于国防、电子、航空航天和汽车工业。预计高质量、厚功能的金属涂层将以环保安全的方式沉积。

9860404 This Small Business Innovation Research (SBIR) Phase I project proposes a novel physical vapor deposition (PVD) alternative to conventional electroplating used in depositing relatively thick functional metal coatings. Electroplating operations are known to generate large quantities of hazardous waste and toxic fumes. The PVD approach will obviate the use of liquid chemicals, recycle solid metals in situ, and leave no emissions. The concept is a non-line-of-site deposition of metals at high rates, which will allow the growth of relatively thick (greater than 10 microns) and uniform deposits of metals on three-dimensional objects simultaneously from all sides. In this way, it may be possible to deposit a large number of small objects or a small number of large objects in a relatively short period. Phase I will explore the effect of process parameters on degrading inclusions in the growing film and the integrity of such thick films. Process modeling, using the statistical design of experiments, will be performed. Chrome, copper, nickel, and other relatively thick coatings are extensively used in the defense, electronics, aerospace, and automotive industries. It is anticipated that high quality, thick functional metal coatings will be deposited in an environmentally safe manner.