U.S.-Korea Cooperative Science: Morphology of Ion Bombarded Surfaces

9910426巴拉巴西该奖项支持印第安纳州圣母大学的艾伯特-拉兹洛·巴拉巴西博士和韩国首尔建国大学的比格纳姆·卡恩教授之间为期3年的合作研究。这项合作的目的是获得对离子轰击侵蚀表面形貌的主要物理因素的一致理解，以及调查表面形貌对溅射产额的影响。离子束溅射是一种特别重要的薄膜加工技术，它是通过含能粒子的撞击从固体表面去除材料。由于它与许多实验技术、测量工具和图案化方法有关，因此离子轰击腐蚀表面的形貌特征是一个备受研究的问题。除了技术驱动力之外，由于提供关于表面形态的详细信息的高分辨率观察技术的日益可用性，这种研究是及时的。PI计划开发集成和离散模型来研究以下问题：(1)溅射过程中的屈服演化动力学，这一现象可以直接与各种实验结果相比较。(2)当热诱导表面较小时，溅射侵蚀表面的低温形态，使用动态重整化群方法研究各向异性对表面形貌的影响。本项目将与韩国首尔建国大学Kahng教授的团队在美韩合作科学计划下共同完成。该项目与美韩合作科学计划的目标相关，该计划旨在通过交流科学信息、想法、技能和技术以及通过在互利问题上的合作来提高美国和韩国科学家和工程师之间的合作水平。韩国科学与工程基金会支持韩国的参与。

9910426BarabasiThis award supports a 3-year collaborative research between Dr. Albert-Laszlo Barabasi, University of Notre Dame, Indiana and Professor Byungnam Kahng at Konkuk University, Seoul, Korea. The proposed collaboration aims to obtain a coherent understanding of the main physical factors contributing to the morphology of surface eroded by ion bombardment, as well as to investigate the effect of the surface morphology on the sputtering yield. Ion-beam sputtering, the removal of material from the surface of solids through the impact of energetic particles, is a particularly important thin film processing technique. Due to its relevance to a number of experimental techniques, measuring tools and patterning methods, the morphological features of surfaces erodes by ion bombardment is a much investigated problem. Beyond the technological driving forces, such studies are timely due to the increasing availability of high resolution observation techniques that offer detailed information about the surface morphology.The PIs plan to develop integration and discrete models to investigate the following problems:(1) The dynamics of yield evolution during the sputtering process, a phenomenon that can be directly compared to various experimental results.(2) The low temperature morphology of sputter eroded surfaces when thermally induced surface is small, and surface relaxation is dominated by ion-induced effective diffusion.(3) To use dynamic renormalization group methods to investigate the effect of the anisotropy on the surface morphology.This project will be performed in conjunction with Professor Kahng's group at Konkuk University, Seoul, Korea under the U.S.-Korea Cooperative Science Program. This project is relevant to the objectives of the U.S.-Korea Cooperative Science Program, which seeks to increase the level of cooperation between U.S. and Korean scientists and engineers through the exchange of scientific information, ideas, skills, and techniques and through collaboration on problems of mutual benefit. The Korea Science and Engineering Foundation support Korean participation.