U.S.-Korea Cooperative Research: Heating and Transport Study for Next Generation Plasma Source

该奖项支持加州大学欧文分校的罗杰·麦克威廉姆斯博士和韩国高级科学技术研究所(KAIST)的张宏英教授进行的为期3年的合作研究。这项拟议中的合作旨在交流美国和韩国等离子体物理学家在等离子体源和诊断方面的想法，并开发下一代等离子体源。加州大学欧文分校和韩国科学技术研究院的合作实验将致力于表征和开发下一代等离子体源。等离子体处理和基础物理实验室等离子体越来越依赖于更大直径的等离子体源。无论是工业研究还是基础科学研究，这些源产生的离子和电子分布对它们的有用性至关重要。韩国高级科学技术研究所物理系的Chang教授团队在电子诊断方面拥有丰富的经验，尤其是与半导体行业所需和计划使用的下一代等离子体源有着密切的联系。加州大学欧文分校物理系的麦克威廉姆斯教授团队在离子诊断方面拥有丰富的经验，并开发了许多用于基础等离子体科学的等离子体源。这两个小组希望合作合并诊断和等离子体源能力，以有利于等离子体处理和基础等离子体科学。该项目将与张教授在韩国的团队在美韩合作科学计划下共同实施。通过对这两个实验室的人员访问，下一代等离子体源和诊断技术的全部配套将迅速用于技术和科学进步。此外，两个实验室的人员将接受另一个实验室的实验专业知识培训，从而在合作结束时扩大每个实验室的能力。该项目与美韩合作科学计划的目标有关，该计划旨在通过交流科学信息、想法、技能和技术以及通过在互利问题上的合作来提高美国和韩国科学家和工程师之间的合作水平。韩国的参与得到了韩国科学与工程基金会(KOSEF)的支持。

9981978McWilliamsThis award supports a 3-year collaborative research between Dr. Roger McWilliams, University of California, Irvine and Professor Hong-Young Chang at Korea Advanced Institute of Science and Technology (KAIST). The proposed collaboration aims to exchange ideas on plasma sources and diagnostics between U.S. and Korean plasma physicists and to develop next generation plasma sources.Collaborative experiments at the University of California, Irvine and KAIST will work to characterize and develop next generation plasma sources. Plasma processing and basic physics laboratory plasmas are increasingly reliant on larger diameter plasma sources. The ion and electron distributions created by these sources are central to their usefulness, for either industry or basic science studies. Professor Chang's group in the Physics Department at Korea Advanced Institute of Science and Technology has extensive experience with electron diagnostics and particularly close connections with next generation plasma sources needed and planned for semiconductor industry use. Professor McWilliams' group in the Physics Department at the University of California, Irvine has extensive experience with ion diagnostics and has developed many plasma sources for basic plasma science use. The two groups wish to collaborate to merge diagnostic and plasma source capabilities to benefit plasma processing and basic plasma science.This project will be performed in conjunction with Professor Chang's group at Korea under the U.S.-Korea Cooperative Science Program. By personnel visits to both laboratories, the full complement of next generation plasma sources and diagnostics will be used together swiftly for technological and scientific advance. Additionally, people at both labs will be trained in the experimental expertise of the other lab, thereby expanding each laboratory's capabilities by the end of the collaboration.This project is relevant to the objectives of the U.S.-Korea Cooperative Science Program, which seeks to increase the level of cooperation between U.S. and Korean scientists and engineers through the exchange of scientific information, ideas, skills, and techniques and through collaboration on problems of mutual benefit. Korean participation is supported by the Korea Science and Engineering Foundation (KOSEF).***