CAREER: A New Framework of Dynamic Monitoring and Control for Semiconductor Processing

PI的研究计划包括理论开发以及德克萨斯大学奥斯汀分校(UT)和高级微设备公司(AMD)之间的合作，以开发用于半导体工艺的下一代动态故障监控框架。AMD获得了NIST颁发的与霍尼韦尔联合开发高级过程控制框架(APCFW)的奖项。PI正在与AMD合作开发新一代监测和控制方法，使用设备工具测量、晶片状态测量和基于实验室的晶片电气测试(WET)。第一部分旨在开发一种新的动态故障监测框架，该框架使用变量中误差模型辨识和具有最大灵敏度的动态结构残差进行故障辨识。第二部分将故障监测框架应用于半导体工艺，并利用设备测量、光学发射光谱(OES)和实验室测试中的湿特性，开发了一种从运行到运行的控制方法。Sandia开发的非侵入式OES传感器将用于以亚秒级采样间隔在宽波长范围内以非常高的分辨率收集数据。与AMD的合作使PI能够访问他们在大学环境中无法获得的制造设备和实时数据。教育计划强调半导体工艺以及故障监测和控制方面的研究和教学的整合。具体任务是：1。在本研究的基础上，编写一本本科/专业教材，内容为《半导体工艺的单元操作与控制》。开发基于互联网的多媒体教学包，为学生提供工程概念的现场演示和自定进度的互动学习。建立双向教育基础设施，培养有AMD实践经验的学生，培养具有现代控制能力的实践型工程师。鼓励女性研究生从事过程控制方面的研究，因为女性工程师在过程控制领域的代表性历来偏低。

The PI's research plan consists of theoretical development and a collaboration between the University of Texas at Austin (UT) and Advanced Micro Devices (AMD) to develop the next generation dynamic fault monitoring and control framework for semiconductor processing. AMD has an award from NIST to develop an advanced process control framework (APCFW) jointly with Honeywell. The PI is collaborating with AMD to develop a new generation of monitoring and control methodologies using equipment tool measurements, wafer state measurements, and lab-based wafer electrical tests (WET).This research plan consists of two parts. Part one aims to develop a new dynamic fault monitoring framework using error-in-variables model identification and dynamic structured residuals with maximized sensitivity for fault identification. Part two applies the fault monitoring framework to semiconductor processing and develop a run-to-run control methodology using equipment measurements, optical emission spectroscopy (OES), and WET properties from laboratory tests. Non-intrusive OES sensors developed at Sandia will be used to collect data at very high resolution over a wide spectrum of wavelengths at sub-second sampling intervals. The collaboration with AMD allows the PI to access their manufacturing equipment and real-time data that are not available in a university environment.The education plan emphasizes the integration of research and education in semiconductor processing and fault monitoring and control. Specific tasks will be:1. Develop an undergraduate/professional text on "Unit Operations and Control of Semiconductor Processes" based on this research.2. Develop an internet-based multimedia teaching package to provide students with live demonstrations of engineering concepts and self-paced interactive learning.3. Establish a bi-directional education infrastructure to educate students with practical experience at AMD and educate practicing engineers with modern control.4. Encourage female graduate students to pursue research in process control as women engineers are historically underrepresented in the process control field.